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Corresponding method for coordinates among different variety parameters in NVM (Non-Volatile Memory) testing

A technology of coordinates and parameters, which is applied in the field of semiconductor integrated circuit test analysis and design, can solve problems such as inconsistent test results and difficult coordinate correspondence, and achieve the effect of accurate and efficient test results and ensuring consistency

Active Publication Date: 2013-04-24
SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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Problems solved by technology

However, there are problems here: in the new test environment (such as: different probers, different testers), the test results themselves may be inconsistent, so it is difficult to complete the coordinate correspondence between the parameters of different varieties

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  • Corresponding method for coordinates among different variety parameters in NVM (Non-Volatile Memory) testing
  • Corresponding method for coordinates among different variety parameters in NVM (Non-Volatile Memory) testing
  • Corresponding method for coordinates among different variety parameters in NVM (Non-Volatile Memory) testing

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Embodiment Construction

[0018] The present invention will be described in further detail below in conjunction with the accompanying drawings and embodiments.

[0019] The invention proposes a method for corresponding coordinates between parameters of different varieties in NVM testing, which is characterized by accuracy and high efficiency. It mainly includes the following steps: For NVM, after the test under a certain variety parameter, write the coordinates (X, Y) of the current die in a fixed storage area, so that the written coordinates can be tested under the new variety parameter In the area, you can first read the coordinates (X, Y) of the die in the specified area to be written, and then record the coordinates (X', Y') under the new variety parameters, so that you can get the following two formulas:

[0020] X'=aX+bY+M;

[0021] Y'=cX+dY+N;

[0022] Among them, a, b, c, d, M, and N are the unknowns in the formula, and the formula is solved through three dies. Thus, the coordinate correspo...

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Abstract

The invention discloses a corresponding method for coordinates among different variety parameters in an NVM (Non-Volatile Memory) testing. The method comprises the following steps of: (1) testing an NVM under a certain variety parameter, writing coordinates (X, Y) of a current die in a fixed memory area; (2) testing the region with the written coordinates under a new variety parameter, reading the coordinates (X, Y) of the written die, and recording coordinates (X', Y') under the new variety parameter; and (3) establishing a corresponding relationship of coordinates between the two variety parameters to acquire the following two formulae that: X'=aX+bY+M, Y' =of cX,+dY +N, wherein a, b, c, d, M and N are unknown numbers in the formulae; the unknown numbers are calculated through differentdies, and are substituted into the formulae to acquire the corresponding relationship of the coordinates under the two variety parameters. The method ensures that the coordinates under different variety parameters are consistent, so that accuracy and high efficiency of testing results under different test environments can be realized.

Description

technical field [0001] The invention belongs to the field of test analysis and design of semiconductor integrated circuits, and in particular relates to a method for corresponding coordinates between parameters of different varieties in NVM (non-volatile memory) test. Background technique [0002] In wafer (wafer) testing, different prober (probes) usually have different variety parameters, or the probes are different when the variety parameters are applied to different test functions, so the test coordinates are inconsistent. When doing correlation between different testers, or when doing engineering analysis on wafers, it is necessary to first determine the die between the parameters of different varieties (die is a single unit of a wafer or silicon chip before packaging. ) coordinate relationship. Usually, the corresponding relationship between the parameters of two different varieties is found by comparing the existing test result graph with the test result on the new p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/28
Inventor 乔静曾志敏桑浚之
Owner SHANGHAI HUAHONG GRACE SEMICON MFG CORP
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