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Evaporator for organic materials

An organic material and evaporator technology, which can be used in evaporation devices, vacuum evaporation plating, metal material coating processes, etc., and can solve problems such as the inability to increase the evaporation rate.

Inactive Publication Date: 2011-08-24
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Therefore, the evaporation rate cannot be significantly increased by changing the temperature of the heating device

Method used

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  • Evaporator for organic materials
  • Evaporator for organic materials
  • Evaporator for organic materials

Examples

Experimental program
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Embodiment Construction

[0016] Reference will now be made in detail to various embodiments, one or more examples of which are illustrated in the accompanying drawings. Each example is provided by way of explanation and not as limitation of the invention. Within the following description of the figures, the same reference numerals designate the same components. Generally speaking, only the differences of individual embodiments are described.

[0017] Some organic materials, such as melamine, are available in 10 -2 Evaporation or sublimation at about 300° C., especially between about 210° C. and about 320° C., at mbar (mbar). In another embodiment, melamine is evaporated at about 250°C and 310°C. The melamine to be sublimated burns at a temperature slightly higher than the sublimation temperature. For example, melamine burns at about 330°C. Therefore, the temperature of the melamine to be evaporated must be controlled. Generally, since melamine burns instead of evaporating at higher temperatures,...

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Abstract

An evaporator for vaporizing organic material is described. The evaporator includes a first chamber having a nozzle adapted to be directed to a substrate to be coated; at least one second chamber for vaporizing the organic material; at least one vapour channel for guiding vaporized organic material from the at least one second chamber to the first chamber; wherein the first chamber is adapted to provide vaporized organic material to the nozzle corresponding to a first virtual sublimation surface, and the at least one second chamber being adapted to provide during operation a second sublimation surface area, wherein the second sublimation surface area corresponds to at least 70 percent of the first virtual sublimation surface.

Description

technical field [0001] Embodiments of the invention relate to a vaporizer for vaporizing organic materials, especially melamine. In addition, the invention relates to a method for coating a substrate with an organic material, especially melamine. Background technique [0002] In general, melamine can be evaporated (sublimed). Usually, the material to be vaporized is arranged in a rectangular crucible in which the material to be vaporized is placed. The crucible can be placed in the evaporation tube and the evaporation tube can be heated with a heating device or heating system. The crucible must be heated to a temperature at which the melamine evaporates. The evaporation temperature of melamine is about 250°C to 300°C. Melamine burns at a temperature of about 330°C. Therefore, the evaporation rate cannot be significantly increased by changing the temperature of the heating device. In addition, the evaporation tube must be adapted to the width of the substrate or web to ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24
CPCC23C14/243C23C14/12B05D2252/02B01B1/005B05D1/60
Inventor S·海恩G·霍夫曼
Owner APPLIED MATERIALS INC