A
solid source
vaporization apparatus includes a housing (1) and several
layers of trays (2), a top cover (11) is installed on the top of the housing (1), an air inlet (12) and an air outlet (13) are installed on the top cover (11), the trays (2) are stacked vertically in the housing (1), a carrier gas
pipe (3) is installed in the housing (1), and an upper end of the carrier gas
pipe (3) is connected to the air inlet (12), the carrier gas
pipe (3) penetrates each layer of trays (2) and extends to the bottommost tray (2), several carrier gas outlets (33) are installed in the carrier gas pipe (3), the carrier gas outlets (33) are installed in the cavity (14) of the bottommost tray (2) or in the cavity (14) of the bottommost tray (2) and the remaining several
layers of trays (2), and several air guide pipes (21) are installed in each of the remaining trays (2) except for the bottommost tray (2). The
solid source
vaporizer adopts parallel
gas transmission passages, and the carrier gas enters the carrier gas pipe (3) from the inlet (12) and then enters each layer of trays (2) respectively. It can only reach the position of the air guide pipe (21) after being horizontally transmitted a long distance along the surface of the
solid source material in each layer of trays (2), so that the carrier gas can carry a large amount of vaporized gas and improve the overall
vaporization efficiency of the solid source
vaporizer.