33results about "Evaporation apparatus" patented technology

In accordance with one or more embodiments of the present disclosure, a rotary evaporator is disclosed. The rotary evaporator may include a base, an evaporation vessel, a rotary union, a motor for rotating the evaporation vessel, a heat jacket, a purge tube and a purge system. The evaporation vessel includes a mounting end that is coupled to the rotary union and an opposite end, with an opening defined in the opposite end and a reservoir in communication with the opening for receiving a sample through the opening. The heat jacket heats or cools the sample when contained in the evaporation vessel, and the purge system controllably supplies fluid to the evaporation vessel via the purge tube.

An atomization apparatus (1), an atomization method, and an air separation unit (10). In the atomization apparatus (1), a target liquid (f0) flows in a liquid conveying pipeline (2). A premixed gas (g1) flows in a premixing pipeline (3). The target liquid (f0) flows into the premixing pipeline (3) at a premixing position (p4) by means of the liquid conveying pipeline (2), so that the target liquid (f0) is mixed with the premixing gas (g1) to form a premixed stream (s1) containing the target liquid (f0) and the premixing gas (g1). The liquid conveying pipeline (2) and the premixing pipeline (3) are arranged such that in the premixing position (p4), a predetermined angle (α) is formed between the flow direction (Df) of the target liquid (f0) and the flow direction (D1) of the premixing gas (g1). An entrainer gas (g0) flows in an atomization pipeline (4), and the premixed stream (s1) is injected into the atomization pipeline (4) by means of the premixing pipeline (3), so that the target liquid (f0) is atomized in the entrainer gas (g0). According to the atomization apparatus (1) and method, the target liquid (f0) can be atomized in the entrainer gas (g0). The air separation unit (10) can recover the cooling capacity in a discharged liquid purge.

Provided is a vaporizer capable of effectively and reliably vaporizing a liquid material for semiconductor manufacturing at a temperature as low as possible without causing heating unevenness. A vaporizer 10 includes: a liquid-material supply unit 12 that supplies a liquid material LM for semiconductor manufacturing; a vaporization unit 20 having therein a vaporization space K for vaporizing the supplied liquid material LM; and a material-gas discharge unit 40 that feeds a material gas VG obtained through vaporization to a following step. The vaporization unit 20 includes: a vaporizer body 22 that is formed of a transparent member which transmits infrared rays, and that allows infrared rays to pass through the vaporization space K from a side wall 22h on one side to the side wall 22h on another side opposite to the one side; transparent spheres 30 that are loaded in the vaporization space K and that transmit infrared rays; a heater H that is disposed so as to be spaced from the vaporizer body 22 by a gap d having a width M and that irradiates the vaporizer body 22 with infrared rays; and a reflective member 28 having a surface that faces the vaporizer body 22 with the heater H disposed therebetween, and that is a mirror surface 28k which reflects infrared rays.

A reaction gas supply system includes a reaction chamber configured to process a substrate using a reaction gas, a mass flow controller (MFC) configured to control an amount of the reaction gas supplied to the reaction chamber, a tank between the reaction chamber and the MFC, the tank having a cylindrical inner space configured to store the reaction gas, and an outlet portion configured to discharge the reaction gas from the tank, and a valve between the tank and the reaction chamber, the outlet portion of the tank having a gradually decreasing diameter toward the valve.

The invention relates to the field of production of caprolactam by Beckmann rearrangement of cyclohexanone-oxime, and discloses a gasification method and system of cyclohexanone-oxime. The method comprises the following steps: gasifying a circulating cyclohexanone oxime liquid phase, inert gas and a first solvent in a gasifier, and then carrying out gas-liquid separation to obtain a first gas-phase material and a liquid-phase material; (2) returning part of the liquid-phase material to the gasifier for gasification; (3) mixing the rest of the liquid-phase material with a second solvent to obtain a mixed solution; then feeding the mixed solution to a fluidized bed to be in contact with solid particles for secondary gasification to obtain solid particles attached with heavy substances and a second gas-phase material; carrying out Beckmann rearrangement reaction on the first gas-phase material and the second gas-phase material; wherein the temperature of the solid particles is at least 20 DEG C higher than that of the mixed liquid. The method provided by the invention can reduce the throwing amount of heavy impurities, improve the utilization rate of cyclohexanone-oxime, reduce the unit consumption of cyclohexanone-oxime, and improve the activity and service life of the catalyst.

To make concentration control possible at high speed and with overshoot suppressed.SOLUTION: An apparatus for controlling concentration 10, to be used in a material vaporizing system 100 to supply material gas produced by introducing carrier gas to a liquid or solid material received within a vaporization tank 2 into vaporization, comprises a flow-rate controller 5 that controls the flow rate of carrier gas, a concentration measuring unit 6 that measures the concentration of material gas, and a flow-rate control unit 11 that controls the flow-rate control input to the flow-rate controller 5 under model predictive control based on a target concentration value of the material gas and a concentration value measured at the concentration measuring unit 6.SELECTED DRAWING: Figure 1

The invention discloses energy-saving mixed hydrogen production equipment for methanol hydrogen production, and relates to the technical field of methanol hydrogen production. Comprising a hydrogen production device, a heat exchanger and a heat exchange pipe, the heat exchanger is arranged in the hydrogen production device, the top end of the heat exchanger is connected with the heat exchange pipe, a driving gear is arranged in the heat exchanger, a rotating seat is rotationally installed in the heat exchange pipe, a transmission gear is fixed to the side wall of the rotating seat, and a gas uniformizing assembly is arranged on the surface of the rotating seat. According to the invention, through the arrangement of the rotating seat and the gas uniformizing assembly, gas entering the heat exchange tube is guided, so that the gas inlet angle can be periodically and dynamically adjusted, the gas is promoted to be uniformly diffused and distributed in the heat exchange tube, the inherent flow field distribution under a fixed flow channel is broken, the heat exchange efficiency is improved, and the heat exchange efficiency is improved. Flow field turbulence caused by too strong local airflow is avoided, the contact uniformity of a heat exchange medium and the pipe wall is ensured, and the heat transfer efficiency and stability are improved.

A method and apparatus are provided for an evaporator assembly. The evaporator assembly includes an evaporator body, a coating vessel, and a porous medium. The evaporator body includes an evaporator sidewall, an evaporator volume defined by the evaporator sidewall, and an opening defined by the evaporator sidewall. The coating material vessel includes a vessel sidewall, a coating material volume defined by the vessel sidewall, and a coating material vessel disposed within the coating material volume. The porous medium is disposed partially within the coating material vessel and partially within the evaporator volume.

An evaporator assembly for a processing chamber in a substrate processing system comprises a canister configured to store and heat precursor liquid and an evaporator valve block mounted the canister. The evaporator valve block comprises a body, a plurality of valves mounted on the body, a carrier gas inlet in fluid communication with the canister, a precursor liquid inlet in fluid communication with the canister, a vapor port in fluid communication with the canister, and a vapor outlet in fluid communication with the processing chamber. Each of the plurality of valves is in fluid communication with respective flow paths contained within the evaporator valve block.

The present invention relates to a deposition apparatus for an organic light emitting diode, and more particularly, to a deposition apparatus for an organic light emitting diode in which a maintenance operation of a deposition material is independently performed by means of an auxiliary chamber and thus an evaluation time for the deposition material is reduced.

A heat transfer device for an aircraft providing heat to the fuel of a fuel conduct, a conditioning system having the heat transfer device, an aircraft including the heat transfer device of the fuel conditioning system, and a method for conditioning fuel of an aircraft. The fuel conduct includes a first end and a second end, in which the first end is connected in fluidic communication to the first inlet of the heat transfer device and the second end is connected in fluidic communication to the first outlet of the heat transfer device.

The invention belongs to the technical field of testing equipment, and provides a working medium outside-pipe high-temperature-position boiling and condensation heat exchange device and method.The device comprises a working medium circulating system, a cooling circulating system and a hot water circulating system, and during working, the cooling circulating system and the hot water circulating system can conduct heat exchange on media in the working medium circulating system; therefore, the medium is changed into steam to rise, and then is condensed and refluxed to simulate the heat exchange condition. Working medium circulation is completed through the height difference between the evaporator and the condenser, power devices such as a compressor or a shield pump are avoided, and the building cost is low; besides, heat exchange states of boiling and condensation outside a working medium pipe under different working conditions can be simulated, the working conditions are convenient to adjust, and construction is convenient; the heat source depends on convective heat transfer of hot water in the pipe, and compared with a test system adopting an electric heating pipe to provide heat, the heat exchange condition of the engineering actual heat exchange pipe can be simulated.

A vaporizer for vaporizing a liquid such as liquified natural gas, comprising: an inlet, an outlet and a heat exchanger, having an axis, therebetween; wherein the heat exchanger defines flow of a fluid therethrough; and wherein the flow of the fluid includes transverse flow of the fluid in one dimension and / or in two dimensions.

The present invention discloses a solid-state source gasification device, comprising a housing and one or more trays, a top cover is provided on the top of the housing. A gas inlet and a gas outlet are provided on the top cover. The trays are vertically stacked in the housing. A carrier gas pipe is provided in the housing. An upper end of the carrier gas pipe is connected to the gas inlet. The carrier gas pipe penetrates through the trays, and extends into the bottommost-layer tray. One or more carrier gas outlets are formed in the carrier gas pipe. The carrier gas outlets are formed in a space of the bottommost-layer tray or formed in a space of the bottommost-layer tray and the rest trays. Except for the bottommost-layer tray, the rest trays are each provided with one or more gas conduits. The solid-state source gasification device of the present invention adopts a parallel gas transmission channel, whereby the carrier gas, after entering the carrier gas pipe from the gas inlet, can enter into each tray separately, and can be transmitted horizontally in each tray along the surface of the solid-state source material for a longer distance before reaching gas conduit, and thus a large amount of gasification gas can be carried in the carrier gas to enhance the overall gasification efficiency of the solid-state source gasification device.

The utility model provides a gasifier which can efficiently and stably gasify liquid raw materials for semiconductor manufacturing at the temperature as low as possible without uneven heating. A vaporizer (10) is configured from a liquid raw material supply unit (12) for supplying a liquid raw material (LM) for semiconductor manufacturing, a vaporizing unit (20) having a vaporizing space (K) for vaporizing the supplied liquid raw material (LM) therein, and a raw material gas discharge unit (40) for discharging the vaporized raw material gas (VG) to the next step. The gasification unit (20) includes: a gasifier main body (22) which is configured from a transparent member through which infrared rays are transmitted and through which the infrared rays pass through the gasification space (K) and through which the infrared rays are transmitted from one side wall (22h) to the other side wall (22h) facing the gasification space (K); a transparent spherical body (30) which is filled in the gasification space (K) and through which infrared rays are transmitted; a heater (H) that is disposed so as to provide a gap (d) having a width (M) with respect to the gasifier main body (22), and that irradiates the gasifier main body (22) with infrared rays; and a reflection member (28) having a heater (H) interposed therebetween, the surface facing the gasifier body (22) being a mirror surface (28k) for reflecting infrared rays.

An assembly includes a vaporizer vessel. In some embodiments, the vaporizer vessel defines an interior volume. In some embodiments, the vaporizer vessel is configured to hold at least one source reagent within the interior volume. In some embodiments, the assembly includes a heater. In some embodiments, the heater is configured to vaporize the at least one source reagent. In some embodiments, the heater is a radiant heat source configured to vaporize the at least one source reagent without heating the vaporizer vessel.

This invention relates to a heat transfer device (1) for an aircraft (100), in particular for providing heat to the fuel of a fuel conduct (4). The present invention also related to a conditioning system comprising a heat transfer device (1) thereof, an aircraft (100) comprising a heat transfer device (1) of a fuel conditioning system thereof and a method for conditioning fuel of an aircraft (100).

The present specification relates to an evaporation chamber (10), comprising a first cavity (30), a second cavity (50), a first pipe (40) for a liquid inlet connecting the outside of the evaporation chamber to the first cavity (30), a second pipe (60) connecting the first cavity (30) to the second cavity (50), and a third pipe (70) for a vapor outlet connecting the second cavity (50) to the outside of the evaporation chamber, wherein the first pipe (40) and the second pipe (60) open into a first half of the first cavity (30) and the second half of the first cavity (30) is not open.

An electrowetting effect-based solar-driven high efficiency humidification system and a working method. A photovoltaic power generation module and an electrowetting high efficiency humidification module are combined, which conform to a solar energy transfer principle in a PV / T device, while liquid droplets are also sprayed at regular intervals on an upper surface of a heat exchange flow channel in the PV / T device, the principles of acceleration of liquid droplet internal flow and a change to surface hydrophilicity / hydrophobicity by electrowetting technology are used, liquid drop evaporation is accelerated, and highly efficient humidification of air is achieved. By means of coupled utilization of electrowetting technology and a PV / T system, water is saved while a large amount of moist air and clean electric energy which can be used for actual production are obtained.

Title: Device for changing a gas from a liquid state to a supercritical state The invention relates to a state change device 1 comprising a first branch 16 and a second branch 18, at least one manifold 6 having at least a first inlet 7 connected to the first branch 16, a second inlet 9 connected to the second branch 18, a first outlet 42 through which the fluid in the supercritical state is extracted and a second outlet 40, the first branch 16 comprising a heat exchanger 24 and a compression element 32, the first branch 16 and the second branch 18 extending from a divergence point 20 and joining within the manifold 6, the circuit (10) comprising at least one return line (46) connected to the second outlet (40) of the manifold (6),said return line (46) being configured to inject between the heat exchanger (24) and the compression element (32) at least a portion of the fluid present in the manifold (6). Figure of the abstract: figure 1,

The invention relates to the field of production of caprolactam by Beckmann rearrangement of cyclohexanone-oxime, and discloses a gasification method and system of cyclohexanone-oxime. The method comprises the following steps: gasifying a circulating cyclohexanone-oxime liquid phase, a first inert gas and a first solvent in a gasifier, and then carrying out gas-liquid separation in a first separation tank to obtain a first gas-phase material and a first liquid-phase material; returning part of the first liquid-phase material to the gasifier for gasification; mixing the rest of the first liquid-phase material with a second solvent to obtain a mixed solution; feeding the mixed liquid and second inert gas into a second gas-liquid separation tank for secondary gasification to obtain a second gas-phase material and a second liquid-phase material; carrying out Beckmann rearrangement reaction on the first gas-phase material and the second gas-phase material; wherein the temperature of the second inert gas is at least 10 DEG C higher than that of the mixed solution. By adopting the method disclosed by the invention, the throwing amount of heavy impurities can be reduced, the utilization rate of cyclohexanone-oxime is improved, and the unit consumption of cyclohexanone-oxime is reduced.

The application provides a sulfuric acid gasifier and a use mode and application thereof, comprising a molten salt flow resistance layer, a molten salt flow area, and a plurality of silicon carbide heat exchange pipes penetrating through the molten salt flow resistance layer and the molten salt flow area, wherein the molten salt flow resistance layer is provided with a porous solid heat-resistant and corrosion-resistant material, and the molten salt flow area and a liquid sulfuric acid cavity are isolated from each other by the salt distributed in the porous solid heat-resistant and corrosion-resistant material; a molten salt inlet is located above a molten salt outlet; and the molten salt is in direct contact with the silicon carbide heat exchange pipes. The molten salt liquid seal solves the problems of poor processing and connection of the silicon carbide pipes. When applied to the thermochemical sulfur-iodine cycle hydrogen production, the recycling of part of the energy on the sulfuric acid heating is realized through a circulating molten salt system.

The present disclosure relates to an evaporator (10) for use inside an evaporation chamber (8) and configured to evaporate an evaporation material (12), the evaporator (10) comprising:-an evaporation crucible (20) comprising an evaporation chamber (19) to contain an evaporation material (14); -an outlet arrangement (24) in flow connection with the evaporation chamber (19) and comprising an evaporation orifice (26) for the flow of evaporated evaporation material (14) from the evaporation chamber (19) into the evaporation chamber (8), where the orifice (26) comprises a flow cross-section with variable and / or adjustable dimensions.

The invention relates to a device and method for the partial for the partial transfer of a liquid sample, comprising multiple components and to a method for the online determination and analysis of these components of a liquid sample comprising several components. The invention also relates to the use of said device as a sample preparation device.

There is provided a chemical supply device for use in a semiconductor manufacturing process, the chemical supply device including a bubbler, wherein the bubbler includes: a lower support surface including a lower concave portion; a side surface smoothly connected to the lower support surface through a corner curved portion; an upper surface extended from the side surface; an inlet extended from an outside of the upper surface to an inside of the bubbler, and configured to inject an output gas for causing a chemical solution contained in the bubbler to evaporate; and an outlet configured to transmit the chemical salutation evaporated in the bubbler, wherein a radius of curvature of the upper surface is greater than or equal to 45% and less than 58% of a diameter of the lower support surface.

The present invention provides a film-forming raw material mixed gas generator and film-forming apparatus that can more reliably vaporize the film-forming raw materials. [Solution] A film-forming raw material mixed gas generating apparatus according to one aspect of the present invention comprises: a film-forming raw material supply unit that supplies liquid film-forming raw materials at a predetermined flow rate; a carrier gas supply unit that supplies carrier gas at a predetermined flow rate; a main vaporization unit that vaporizes the film-forming raw materials by heating the film-forming raw materials supplied from the film-forming raw material supply unit and the carrier gas supplied from the carrier gas supply unit; and an auxiliary vaporization unit having a porous vaporization member that captures droplets of the film-forming raw materials carried over into the gas flowing out from the main vaporization unit and vaporizes the captured droplets of the film-forming raw materials.

Provided is a vaporizer capable of effectively and reliably vaporizing a liquid material for semiconductor manufacturing at a temperature as low as possible without causing heating unevenness. A vaporizer 10 includes: a liquid-material supply unit 12 that supplies a liquid material LM for semiconductor manufacturing; a vaporization unit 20 having therein a vaporization space K for vaporizing the supplied liquid material LM; and a material-gas discharge unit 40 that feeds a material gas VG obtained through vaporization to a following step. The vaporization unit 20 includes: a vaporizer body 22 that is formed of a transparent member which transmits infrared rays, and that allows infrared rays to pass through the vaporization space K from a side wall 22h on one side to the side wall 22h on another side opposite to the one side; transparent spheres 30 that are loaded in the vaporization space K and that transmit infrared rays; a heater H that is disposed so as to be spaced from the vaporizer body 22 by a gap d having a width M and that irradiates the vaporizer body 22 with infrared rays; and a reflective member 28 having a surface that faces the vaporizer body 22 with the heater H disposed therebetween, and that is a mirror surface 28k which reflects infrared rays.

The present invention reduces pressure loss in a gas-liquid mixer and is provided with a main body block (2) that is used to mix together a liquid material and a carrier gas, and a control valve (3) that is disposed in the main body block and adjusts a flow rate of the liquid material. An annular liquid material supply groove (M1) having a supply port (H1) for the liquid material formed in an inner surface thereof, and an annular gas-liquid mixing groove (M2) having a supply port (H2) for the carrier gas and a discharge port (H3) for the gas-liquid mixture formed in an inner surface thereof are formed in a valve seat portion (21) of the main body block which the control valve is either in contact with or is separated from. One of either the liquid material supply groove or the gas-liquid mixing groove is formed on an inner side of the other of the liquid material supply groove or the gas-liquid mixing groove.

The invention relates to the field of production of caprolactam by Beckmann rearrangement of cyclohexanone-oxime, and discloses a gasification method and system of cyclohexanone-oxime. The method comprises the following steps: (1) feeding a circulating cyclohexanone-oxime liquid phase to a gasifier for gasification, and then carrying out gas-liquid separation to obtain a gas-phase material and a liquid-phase material; (2) returning a part of the liquid-phase material obtained in the step (1) to the gasifier in the step (1) for gasification, and sending the rest of the liquid-phase material to a rectifying tower for refining to obtain a tower top produced material and a tower kettle produced material; returning the produced material at the top of the rectifying tower to the gasifier in the step (1) for gasification; wherein the weight of the residual liquid-phase material is 0.1-50% of the weight of the liquid-phase material obtained in the step (1). By adopting the method, the throwing amount of heavy impurities can be greatly reduced, the utilization rate of cyclohexanone-oxime is improved, and the unit consumption of cyclohexanone-oxime is reduced.

To provide a production apparatus of a mixed gas of a film deposition raw material capable of vaporizing a film deposition raw material more certainly, and a film deposition apparatus.SOLUTION: A production apparatus of a mixed gas of a film deposition raw material according to an aspect of the present invention includes a film deposition raw material supply unit 11 for supplying a film deposition raw material liquid R1 at a specified flow rate, a carrier gas supply unit 12 for supplying a carrier gas C at a specified flow rate, a main vaporization unit 13 for vaporizing the film deposition raw material by heating the film deposition raw material supplied from the film deposition raw material supply unit and the carrier gas supplied from the carrier gas supply unit, and an auxiliary vaporization unit 14 having a porous vaporization member 141 for capturing droplets of the film deposition raw material carried over into a gas flowing out of the main vaporization unit and vaporizing the captured droplets of the film deposition raw material.SELECTED DRAWING: Figure 1