The application relates to the technical field of
wafer testing equipment, in particular to a heating
aging test tool, which comprises a storage rack, a
wafer clamp placed on the storage rack, a detection
assembly comprising a plurality of elastic probes and a heating disc located on one side of the storage rack, and a hot air flow guide
assembly comprising an air outlet male head arranged on one side of the heating disc, a heat conduction cover provided with an air guide
pipe away from one side of the air outlet male head, and a cavity with gradually increased
air volume and gradually reduced air flow rate from the inside to the outside of the air guide
pipe. The hot air flow guide
assembly is arranged on the conveying frame, the heat of the heating disc is guided to the upper side of the
wafer through the air flow of the heat conduction cover, the space above the wafer is divided into a plurality of cavities, the space size and the space shape of each cavity are set, the air flow rate and the hot
air volume of each space are adjusted, the influence of heat loss in the air flow process is reduced, the
heating effect of each part of the wafer is similar, and the detection effect is improved.