Massively parallel atomic layer deposition/chemical vapor deposition system

Abstract

A method and apparatus for the use of individual vertically stacked ALD or CVD reactors. Individual reactors are independently operable and maintainable. The gas inlet and output are vertically configured with respect to the reactor chamber for generally axi-symmetric process control. The chamber design is modular in which cover and base plates forming the reactor have improved flow design.

Description

RELATED APPLICATIONS [0001] The present application is a Divisional of U.S. patent application Ser. No. 10 / 282,609, filed Oct. 29, 2002, entitled “Massively Parallel Atomic Layer Deposition / Chemical Vapor Deposition System”, which claims priority to U.S. Provisional Application No. 60 / 346,005, filed on Oct. 29, 2001. This patent application is hereby incorporated by reference in its entirety.FIELD OF THE INVENTION [0002] The present invention relates to semiconductor processing and, more particularly, to an apparatus and method for providing a massively parallel ALD / CVD system. BACKGROUND OF THE RELATED ART [0003] Chemical Vapor Deposition (CVD) is a widely used deposition process for the growth of thin films on various substrates, including semiconductor wafers. As microelectronics device dimensions are reduced, or scaled down, CVD is an attractive method for the deposition of conformal films over complex device topography. In the field of atomic / molecular level film deposition, a ...

AI Technical Summary

Benefits of technology

[0020] In one embodiment, the reactor chamber is formed by placing a top plate and a bottom plate onto a frame. The top plate and the bottom may have a particularly shaped recessed regions to form the top and bottom of the chamber conforming to the particular shape. In one embodiment, the top and bottom of the chamber has a cone-shape to improve the generally axi-symmetric gas flow in the chamber. In another embodiment, horn-shaped chamber is used to provide an option to further improve the gas flow. The low profile reactors are individually constructed with a cover plate integrated with and containing a horizontal input conduit and a base plate integrated with and containing a horizontal conduit for exhaust to minimize the total vertical height of the assembled low profile reactors.

Problems solved by technology

In reference to ALD processes, batch ALD reactors are believed to be difficult to maintain relative to single wafer reactors, which historically have had the capability for in-situ cleans, at least films made by CVD.

However, one critical limitation for wider acceptance of ALD is the fact that high throughput processes are difficult to realize with single reactor systems.

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