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Device and method for measuring glass thickness by adopting sinusoidal modulation multi-beam laser heterodyning of Doppler galvanometer

A Doppler galvanometer and laser heterodyne technology, applied in the field of micro-displacement detection, can solve the problem of low measurement accuracy

Inactive Publication Date: 2013-02-13
HARBIN INST OF TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the problem of low measurement accuracy when the vibrating mirror is uniformly accelerated and linearly moved in the existing method of measuring glass thickness by using multi-beam laser heterodyne, and to provide a Doppler vibrating mirror sinusoidal modulation multi-beam laser external Device and method for differentially measuring glass thickness

Method used

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  • Device and method for measuring glass thickness by adopting sinusoidal modulation multi-beam laser heterodyning of Doppler galvanometer
  • Device and method for measuring glass thickness by adopting sinusoidal modulation multi-beam laser heterodyning of Doppler galvanometer
  • Device and method for measuring glass thickness by adopting sinusoidal modulation multi-beam laser heterodyning of Doppler galvanometer

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specific Embodiment approach 1

[0061] Specific implementation mode one: the following combination figure 1 Describe this embodiment, the device for measuring glass thickness by sinusoidal modulation of multi-beam laser heterodyne by Doppler vibrating mirror in this embodiment, the device is composed of laser 1, polarization beam splitter PBS2, quarter wave plate 3, galvanometer 4. It is composed of a flat mirror 5, a glass plate of thickness to be measured 6, a converging lens 7, a photodetector 8 and a signal processing system 9,

[0062] The linearly polarized light emitted by the laser 1 is reflected by the polarizing beam splitter PBS2 and then incident on the quarter-wave plate 3, and the light beam transmitted by the quarter-wave plate 3 is incident on the light-receiving surface of the vibrating mirror 4, and passes through the The light beam reflected by the vibrating mirror 4 is transmitted by the quarter-wave plate 3 again and sent to the polarizing beam splitter PBS2, and the light beam transmitt...

specific Embodiment approach 2

[0065] Embodiment 2: This embodiment is a further description of Embodiment 1, and the laser 1 is a H0 solid-state laser.

specific Embodiment approach 3

[0066] Specific embodiment three: this embodiment is a further description of embodiment one or two, the signal processing system 9 is composed of a filter 9-1, a preamplifier 9-2, an analog-to-digital converter A / D9-3 and a digital The signal processor DSP9-4 is composed of,

[0067] The filter 9-1 filters the received electrical signal output by the photodetector 8 and sends it to the preamplifier 9-2, and the signal amplified by the preamplifier 9-2 is output to the analog-to-digital converter A / D9-3, the analog-to-digital converter A / D9-3 sends the converted digital signal to the digital signal processor DSP9-4.

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Abstract

The invention discloses a device and a method for measuring glass thickness by adopting sinusoidal modulation multi-beam laser heterodyning of a Doppler galvanometer, and belongs to the technical field of micro displacement detection. The device consists of a laser device, a polarizing beam splitter (PBS), a quarter wave plate, a galvanometer, a planar reflector, a glass plate with to-be-measuredthickness, a converging lens, a photoelectric detector and a signal processing system. The method comprises the following steps of: turning on a driving power supply of the galvanometer so that the galvanometer starts simple harmonic vibration; meanwhile, turning on the laser device; and starting measurement, in the measurement process, continuously acquiring electrical signals output by the photoelectric detector through the signal processing system, processing the acquired difference frequency signals, and acquiring the thickness d of the glass plate with to-be-measured thickness according to the relationship fp=Kpd between the frequency and the thickness, wherein d is equal to fp / Kp, and in the formula, fp is the frequency of laser heterodyne signals, and Kp is a proportionality coefficient of fp and d. The device and the method are suitable for measuring the glass thickness.

Description

technical field [0001] The invention relates to a device and method for measuring glass thickness by sinusoidally modulating a multi-beam laser heterodyne with a Doppler vibrating mirror, and belongs to the technical field of micro-displacement detection. Background technique [0002] Realizing the precise measurement of glass thickness is a problem that the engineering field has been facing and trying to solve. With the development of science and technology, thickness measurement methods are constantly being introduced, including optical measurement, interferometry and diffraction. The above methods generally cannot meet the requirements of high-accuracy angle measurement. [0003] Optical thickness measurement has attracted people's attention because of its non-contact, high precision and simple structure, and the use of optical methods for thickness measurement has been more and more widely used. Among optical measurement methods, laser heterodyne measurement technology...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/06
Inventor 李彦超王春晖高龙曲杨邵文冕
Owner HARBIN INST OF TECH