Array gas-sensitive sensor structure for detection of hydrogen
A gas sensor and hydrogen technology, which is applied in the field of arrayed gas sensor structure to solve the sensitivity and measurement range, improve the measurement range and improve the sensitivity.
Active Publication Date: 2012-01-11
XI AN JIAOTONG UNIV
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[0004] In order to overcome the shortcomings of the above-mentioned prior art, the object of the present invention is to provide an arrayed gas sensor structure for hydrogen detection, which solves the problem of flexible control of sensor sensitivity and measurement range
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[0014] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0015] An arrayed gas sensor structure for hydrogen detection, including a rigid substrate 1, refer to figure 1 On the surface of the rigid substrate 1, the flexible material 2, the transition layer 3, and the Pd material nano-slit electrode 4 are sequentially prepared to form a four-layer structure of "rigid substrate 1-flexible material 2-transition layer 3-Pd material planar electrode 4".
[0016] The Pd material nano-slit electrode 4 has the characteristics of array arrangement, and the Pd material nano-slit electrode 4 contains at least two or more different planar electrode gaps 5, the planar electrode gap 5 is nanoscale, and the planar electrode gap 5 is used to detect hydrogen-containing 6 conditions Under the change of electrical characteristics, the width value of the plane electrode gap 5 conforms to the arithmetic sequence, and the gap difference ...
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Provided is an array gas-sensitive sensor structure for detection of hydrogen. According to the invention, a flexible material, a transition layer and Pd nanometer joint electrodes are sequentially arranged on the surface of a rigid substrate, wherein, the Pd nanometer joint electrodes have the characteristic of array arrangement and contain at least more than two different plane electrode gaps, width values of the plane electrode gaps form arithmetic progression, and a gap difference value equals to the minimum width value of the Pd nanometer joint electrodes; Pd nanometer joint electrodes with a same gap width value are in parallel connection to form a set of hydrogen detection circuit; Pd plane electrodes with a minimum gap width value are utilized to form a hydrogen detection circuit so as to improve sensitivity of a sensor, Pd plane electrodes with a maximum gap width value are utilized to form a hydrogen detection circuit so as to improve the measuring range of the sensor, and therefore, the problem that conventional hydrogen sensors have difficulty in simultaneously guaranteeing sensitivity and measuring range is overcome.
Description
technical field [0001] The invention belongs to the technical field of micro-nano devices and sensors, and in particular relates to an arrayed gas sensor structure for hydrogen detection. Background technique [0002] At present, hydrogen sensitive sensors can be divided into two types: optical type and electrical characteristic type. Among them, the optical hydrogen sensor uses the change of the optical properties of the hydrogenated material film after absorbing hydrogen to realize the detection of hydrogen. This type of sensor has the advantages of strong safety and high sensitivity, but the disadvantages are that the test system is complicated, the response is slow, it is difficult to operate and control, and the service life is short. Compared with the optical hydrogen sensor, the detection principle of the electrical characteristic hydrogen sensor is extremely simple, which is to express the catalytic reaction state of hydrogen on the electrode in the form of an elect...
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IPC IPC(8): G01N27/00
Inventor 丁玉成邵金友刘红忠田洪淼黎相孟缪林林
Owner XI AN JIAOTONG UNIV