Belt monitoring system for carrying device
Patent Information
- Authority / Receiving Office
- CN Β· China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- AU OPTRONICS CORP
- Publication Date
- 2012-04-11
- Estimated Expiration
- Not applicable Β· inactive patent
Smart Images
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Abstract
Description
technical field
[0001] The present invention relates to a monitoring system, and in particular to a detection system for monitoring belt breakage. Background technique
[0002] In modern industrial society, automatic control system gradually replaces manpower and becomes the key to improve production efficiency. In particular, the advanced semiconductor manufacturing process has introduced a large number of automated equipment to perform various precision manufacturing steps to reduce costs and human errors.
[0003] For example, in a semiconductor factory, it is common to see a grinder table for grinding wafers, a robotic arm for grabbing wafers, and conveying equipment for transferring wafers or glass substrates, etc. Among the above-mentioned equipment, belt structures are often seen as power transmission or suspension of heavy objects.
[0004] Taking the existing suspended conveying equipment as an example, it usually includes a lifting belt connected with a driving m...