Image measuring instrument and non-linear error correcting method and correcting plate thereof

A non-linear error and image measuring instrument technology, applied in the field of image measuring instruments, can solve the problems of low efficiency and low correction accuracy, and achieve the effects of reducing mechanical errors, stabilizing measurement data, and improving measurement accuracy

Inactive Publication Date: 2012-05-09
ZHUHAI EASSON MEASUREMENT TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is to solve the problem of low accuracy and low efficiency of nonlinear error correction of image measuring instrument

Method used

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  • Image measuring instrument and non-linear error correcting method and correcting plate thereof
  • Image measuring instrument and non-linear error correcting method and correcting plate thereof
  • Image measuring instrument and non-linear error correcting method and correcting plate thereof

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Embodiment Construction

[0030] The present invention provides a non-linear error correction plate of an image measuring instrument, the correction plate is provided with a plurality of standard circles and a plurality of concentric circles arranged in a matrix, the plurality of concentric circles are divided into two groups, the first The set of concentric circles is based on the standard circle in the lower left corner, the second set of concentric circles is based on the standard circle in the upper right corner, and the plurality of concentric circles are set at intervals based on the standard circle.

[0031] figure 1 It is a structural schematic diagram of a specific embodiment of the calibration plate, figure 2 for figure 1 Partial enlarged view in the lower left corner in the middle, the present invention is described in detail below in conjunction with accompanying drawing.

[0032] Such as figure 1 , figure 2 As shown, there are 5084 standard circles with a diameter of 0.5mm on the cal...

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Abstract

The invention discloses an image measuring instrument and a non-linear error correcting method and a correcting plate thereof. The correcting plate is provided with a plurality of standard circles and a plurality of concentric circles which are arranged in the form of a matrix, wherein the plurality of concentric circles are divided into two groups; in a first group of concentric circles, a standard circle at a leftmost lowermost corner is taken as a standard; in a second group of concentric circles, a standard circle at a rightmost uppermost corner is taken as a standard; and the plurality of concentric circles are arranged at intervals on the basis of the standard circles. In the correcting plate provided by the invention, the coordinate of a circle center is selected by measuring in a point taking way instead of aligning the edges of a line, so that a point taking error caused by the width factor of the line is reduced. In the non-linear error correcting method for the image measuring instrument provided, twice non-linear error correction is performed on a workbench, and two non-linear error correcting values are averaged, so that the measuring accuracy is increased; and moreover, non-linear error correction is performed along longitudinal and transverse directions at the intervals of 10 millimeters in the measuring range of the workbench, so that mechanical errors are effectively eliminated or reduced.

Description

technical field [0001] The invention relates to an image measuring instrument, in particular to an image measuring instrument, a nonlinear error correction method and a correction plate thereof. Background technique [0002] During the production and assembly process of the image measuring instrument, measurement errors will be caused by factors such as mechanical errors and microscope distortion. Therefore, in order to reduce the measurement error and improve the measurement accuracy of the image measuring instrument, nonlinear error correction will be performed. The entire nonlinear error correction process of the existing image measuring instrument is manually operated. A glass line ruler is placed on the workbench to measure the lines on the glass line ruler, and then the measurement results are input into the image measurement In the system, the image measurement system then corrects the nonlinear error of the measurement results. The specific method is to use a standa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/00
Inventor 张松涛黄志良
Owner ZHUHAI EASSON MEASUREMENT TECH
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