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Active element array substrate and method for manufacturing same

A technology of active components and array substrates, which is applied in the manufacture of semiconductor/solid-state devices, electrical components, and electrical solid-state devices, etc., and can solve the problems of poor adsorption of bumpers or machines, deformation of active component array substrates and glass carrier plates, and difference in thermal expansion coefficients. big problem

Inactive Publication Date: 2012-06-13
AU OPTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the thermal expansion coefficient of the plastic is very different from that of the glass carrier, and even from the thermal expansion coefficient of the inorganic dielectric layer (eg gate dielectric layer, protective layer) on the active element array substrate, it is difficult to It is easy to cause stress accumulation in the active device array substrate and the glass carrier, so that the active device array substrate and the glass carrier are deformed, resulting in collisions or poor adsorption of the machine.

Method used

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  • Active element array substrate and method for manufacturing same
  • Active element array substrate and method for manufacturing same
  • Active element array substrate and method for manufacturing same

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Embodiment approach

[0017] According to one embodiment of the present invention, a method for manufacturing an active device array substrate includes the following steps (it should be understood that the steps mentioned in this embodiment, unless the order is specifically stated, can be based on actual needs Adjust the order before and after, and even execute at the same time or part of it):

[0018] (1) A soft substrate is provided, and a transistor area and a light-transmitting area are defined on the soft substrate.

[0019] (2) A gate is formed on the transistor region of the flexible substrate.

[0020] (3) A dielectric layer and a semiconductor layer are sequentially formed, and the dielectric layer and the semiconductor layer cover the gate and the soft substrate.

[0021] (4) Remove part of the semiconductor layer to form a channel layer above the gate, and remove part of the thickness of the dielectric layer in the light-transmitting region, so that the part of the dielectric layer abov...

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PUM

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Abstract

An active element array substrate comprises a soft substrate, a grid, a dielectric layer, a channel layer, a source electrode, a leakage electrode and a pixel electrode. The soft substrate defines a transistor zone and a transmitting zone, the transistor zone and the transmitting zone are adjacent, and the gird is located on the soft substrate in the transistor zone; the dielectric layer covers the grid and the soft substrate, a part of dielectric layer located at the upper part of the grid possesses a first thickness, a part of dielectric layer located on the soft substrate in the transmitting zone possesses a second thickness, and the second thickness is less than the first thickness; the channel layer, the source electrode and the leakage electrode are located on the dielectric layer in the transistor zone, the channel layer is located at the upper part of the grid, and the source electrode and the leakage electrode are located at the two sides of the channel layer and are electrically connected with the channel layer separately; the pixel electrode is located on the dielectric layer in the transmitting zone and is electrically connected with the leakage electrode.

Description

technical field [0001] The invention relates to an active element array substrate and a manufacturing method thereof. Background technique [0002] The Electro-Phoretic Display (EPD) was originally developed in the 1970s, and its characteristic is to include charged balls. The ball is white on one side and black on the other. When the electric field is changed, the ball will turn up and down and take on different colors. The second generation of electrophoretic displays was developed in the 1990s. It is characterized by microcapsules instead of traditional balls, and the capsules are filled with colored oil and charged white particles. Through the control of the external electric field, the white particles move up or down. When the white particles go up (close to the direction of the reader), they show white, and when they go down (away from the direction of the reader), they show white. The color of the oil. [0003] In general, most electrophoretic displays use glass a...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/02H01L21/77
Inventor 叶家宏林武雄李明贤彭佳添黄伟明
Owner AU OPTRONICS CORP