Active element array substrate and method for manufacturing same
A technology of active components and array substrates, which is applied in the manufacture of semiconductor/solid-state devices, electrical components, and electrical solid-state devices, etc., and can solve the problems of poor adsorption of bumpers or machines, deformation of active component array substrates and glass carrier plates, and difference in thermal expansion coefficients. big problem
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[0017] According to one embodiment of the present invention, a method for manufacturing an active device array substrate includes the following steps (it should be understood that the steps mentioned in this embodiment, unless the order is specifically stated, can be based on actual needs Adjust the order before and after, and even execute at the same time or part of it):
[0018] (1) A soft substrate is provided, and a transistor area and a light-transmitting area are defined on the soft substrate.
[0019] (2) A gate is formed on the transistor region of the flexible substrate.
[0020] (3) A dielectric layer and a semiconductor layer are sequentially formed, and the dielectric layer and the semiconductor layer cover the gate and the soft substrate.
[0021] (4) Remove part of the semiconductor layer to form a channel layer above the gate, and remove part of the thickness of the dielectric layer in the light-transmitting region, so that the part of the dielectric layer abov...
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