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Bi-axial angular velocity sensor

A speed sensor, shaft angle technology, applied in the field of sensors, to achieve the effect of reducing system volume, stable performance, and reducing device cost

Active Publication Date: 2012-06-20
南京威惯传感科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0008] Disadvantages of the existing technology: the existing two-axis angular velocity detecti

Method used

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Embodiment Construction

[0029] The present invention will be further described below in conjunction with the accompanying drawings.

[0030] See figure 1 , 2 : A two-axis angular velocity sensor, including a base 2 with a permanent magnet 1 installed, a mass block 3 is arranged above the base 2, the mass block 3 is connected to the base 2 through a connecting mechanism, and an induction coil is arranged on the mass block 3 4. The two ends of the induction coil 4 output the induced electromotive force;

[0031] The lower end surface of the mass block 3 is fixed with a detection capacitor upper electrode 5, and the upper surface of the base 2 is fixed with a detection capacitor lower electrode 5', and the detection capacitor upper electrode 5 is parallel to the detection capacitor lower electrode 5', and the two form a detection capacitance;

[0032] See figure 2 , 3 : the upper surface of the base 2 is also fixed with a reference capacitor lower electrode 6', and the top of the base 2 is also fi...

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Abstract

The invention discloses a bi-axial angular velocity sensor, which is characterized by comprising a base which is provided with a permanent magnet; a mass block is arranged above the base and connected to the base through a connection mechanism; an induction coil is distributed on the mass block; two ends of the induction coil output induction electromotive force; an upper electrode of a detection capacitor is fixed on the lower end surface of the mass block; a lower electrode of the detection capacitor is fixed on the supper surface of the base; the upper and lower electrodes of the detection capacitor are opposite to each other in parallel to form the detection capacitor; a lower electrode of a reference capacitor is also fixed on the upper surface of the base; and an upper electrode of the reference capacitor is fixed above the base; the upper and lower electrodes of the reference capacitor are opposite to each other in parallel to form the reference capacitor. The bi-axial angular velocity sensor disclosed by the invention achieves the aim of bi-axial angular velocity detection in low cost and miniaturization based on electromagnetic drive and the technology of magnetoelectricity/capacitance detection.

Description

technical field [0001] The invention belongs to the field of sensor technology, in particular to a MEMS-based two-axis angular velocity sensor. Background technique [0002] The Coriolis force is a description of the offset of the linear motion of a particle in a rotating system due to inertia relative to the linear motion of the rotating system. The vast majority of MEMS angular velocity sensors rely on alternating Coriolis forces induced by vibrations and rotations that are orthogonal to each other. The design and working principle of MEMS angular velocity sensors mainly adopt the concept of vibrating components to sense angular velocity. MEMS angular velocity sensors are widely used in the field of angle detection of rotating objects. According to the driving principle and detection principle, the existing angular velocity sensor technology based on Coriolis force can be divided into electrostatic drive capacitance detection, electromagnetic drive electromagnetic detect...

Claims

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Application Information

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IPC IPC(8): G01P9/02G01C19/02
Inventor 吴英罗彪江刺正喜刘宇欧益宏向毅柏俊杰周兆英
Owner 南京威惯传感科技有限公司