Rotary exchanging method and rotary exchanging device for double workpiece platforms based on synchronous steering of turntable gear
A technology of double workpiece table and workpiece table, which is applied in the direction of exposure device, electrical components, conveyor objects, etc. in the photolithography process, can solve the problems of shortening the balance time, loss of the target of the laser interferometer, and small moment of inertia, etc. The effect of engraving machine productivity, shortening balance time, and improving operating efficiency
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[0025] Below in conjunction with accompanying drawing, the present invention is described in further detail:
[0026] A double-worktable rotation exchange method based on the synchronous direction adjustment of the turntable gear, the method includes the following steps:
[0027] The initial working state of the system is that the pre-alignment work of the second workpiece table of the pretreatment station is completed, and the exposure work of the first workpiece table of the exposure station is completed;
[0028] In the first step, the first workpiece stage after exposure is driven by the Y-direction long-stroke linear motion unit and the X-direction first long-stroke motion unit to the predetermined position of the table change, and then the first shaft connection device installed on the return transfer table device is lifted. and connect with the first workpiece table rotation shaft at the bottom of the first workpiece table, and at the same time, the second shaft connect...
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