Eureka AIR delivers breakthrough ideas for toughest innovation challenges, trusted by R&D personnel around the world.

Two-workpiece-platform rotary exchange method and device based on cable-box anti-rotation mechanisms

A technology of double workpiece table and workpiece table is applied in the direction of exposure device of photoengraving process, conveyor objects, electrical components, etc. The effect of switching efficiency and short switching time

Inactive Publication Date: 2013-09-18
HARBIN INST OF TECH
View PDF12 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At the same time, it solves a series of problems such as the phase inversion of the cable table, the winding of the cable table cable, the loss of the target of the laser interferometer, the large radius of gyration, and the large moment of inertia.
The present invention can also solve the problems of large impact torque and many beats in the existing linear channel change scheme, and can adopt a smaller mass balance system, which is beneficial to shorten the balance time, simplify the system at the same time, reduce costs, and shorten the cycle time of channel change. It takes less time to change the platform, which can effectively improve the productivity of the lithography machine

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Two-workpiece-platform rotary exchange method and device based on cable-box anti-rotation mechanisms
  • Two-workpiece-platform rotary exchange method and device based on cable-box anti-rotation mechanisms
  • Two-workpiece-platform rotary exchange method and device based on cable-box anti-rotation mechanisms

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0022] Below in conjunction with accompanying drawing, embodiment of the present invention is described in further detail:

[0023] Based on the anti-rotation mechanism of the cable box, the double workpiece table rotation exchange method in the same phase is composed of three beats. The first beat is: after the first workpiece table completes the exposure process and the second workpiece table completes the pretreatment process, Moving from the exposure station and the pretreatment station to the center of the abutment respectively, the card grabbing device of the rotary transfer table absorbs the rotary ring sleeve of the first workpiece table and the rotary ring sleeve of the second workpiece table through electromagnetic adsorption, and at the same time, the X-direction first linear electric The gripping mechanism on the motor and the second linear motor mover in the X direction releases the first workpiece table adapter device and the second workpiece table adapter device ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a two-workpiece-platform rotary exchange method and a device based on cable-box anti-rotation mechanisms, belonging to the technology of semiconductor manufacturing equipment. The device comprises two workpiece platforms, a rotary switching platform and two cable-box anti-rotation devices, wherein in the rotary exchange process of the two workpiece platforms, the rotary switching platform clamps the two workpiece platforms and rotates around the center of a base platform so as to realize exchange of an exposure station and a preprocessing station; and the cable-box anti-rotation mechanisms control self rotation of the two workpiece platforms so as to guarantee the same phase of the two workpiece platforms in the platform exchange process. The device in the invention can be used for solving the problems of large impact torque and more platform exchange steps in the existing linear platform exchange scheme and phase reverse of the two workpiece platforms, cable winding and target missing of a laser interferometer and the like in the existing rotary platform exchange scheme, and adopts a smaller weight balancing system so as to be beneficial to shortening the balance time; and simultaneously the system is simplified, the cost is reduced, the platform exchange steps are reduced, the platform exchange time is shortened, and the yield of photoetching machines is effectively improved.

Description

technical field [0001] The invention belongs to the technical field of semiconductor manufacturing equipment, and mainly relates to a method and device for rotating and exchanging double workpiece tables based on a cable box anti-rotation mechanism. Background technique [0002] Lithography machine is one of the important ultra-precision equipment in the manufacture of very large scale integrated circuits. The resolution and engraving accuracy of the lithography machine determine the minimum line width of the integrated circuit chip. At the same time, the yield of the lithography machine greatly affects the production cost of the integrated circuit chip. As the key subsystem of the lithography machine, the workpiece table It also determines the resolution, overlay accuracy and productivity of the lithography machine to a large extent. [0003] Productivity is one of the main goals of lithography machine development. Under the condition of satisfying the resolution and over...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20H01L21/67H01L21/677
Inventor 谭久彬闻荣伟刘永猛崔继文
Owner HARBIN INST OF TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Eureka Blog
Learn More
PatSnap group products