Light path interchange device based on total reflection

Abstract

The invention relates to a light path interchange device based on total reflection, which consists of eight isosceles right-angle prisms with the same specification; a light path structure control system between an incident light beam and an outgoing light beam is formed by the eight prisms; and two parallel incident light beams are totally reflected by the system for four times and are then emitted in parallel, so that position interchange can be realized, but the interval and the optical property of the two light beams are not changed. The light path interchange device is small in volume, simple in structure, stable in control and free from the influence for light beam polarization state.

Description

technical field

[0001] The invention relates to an optical path structure for laser interferometry, and belongs to the field of nanometer measurement, in particular to an optical path interchange device based on total reflection. Background technique

[0002] One of the most promising sciences of the 21st century. It involves scientific research and industrial fields such as microelectronics, optics, materials science, mechanics, biology and life sciences. Its purpose is to research, develop and process materials, devices and systems with critical dimensions close to or less than 100nm, so as to obtain A product with the required functionality and performance.

[0003] At present, there are two main categories of nanometer measurement methods: non-optical measurement methods represented by scanning probe microscopes and optical measurement methods represented by various laser interferometers. Non-optical nanometer measurement methods represented by scanning probe microscop...

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