Air bubble ingress prevention mechanism, liquid material discharge device provided with the same, and liquid material discharge method
A discharge device and air bubble technology, which is applied to the device and coating of the surface coating liquid, can solve the problems of quantitative discharge, unfixed plunger advance, etc., and achieve the effect of reducing unevenness and simple filling action
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Embodiment 1
[0122] [discharging device]
[0123] Figure 5 and Image 6 The discharge device provided with the air-bubble prevention mechanism of Example 1 is shown. Figure 5 Part (a) shows the front view of the discharge device, Figure 5 Part (b) of (b) shows a side view. again, Image 6 It is a cross-sectional view of main parts showing the air-bubble prevention mechanism and discharge mechanism. Image 6 The hatched part in is the section.
[0124] The discharge device 25 includes: a liquid substance supply source (syringe pump 26) that supplies the liquid substance 20; a metering unit 6 filled with the liquid substance 20 to be discharged; a plunger 8 that moves forward and backward in the metering unit 6; a nozzle 38 , which has a discharge port for discharging the liquid substance 20; a switching valve 39, which switches the communication between the liquid substance supply source and the metering part 6, or the communication between the metering part 6 and the nozzle 38;
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Embodiment 2
[0143] [Coating device]
[0144] Figure 7 A coating device equipped with the discharge device of the above-mentioned Example 1 is shown.
[0145] The coating device 44 of this embodiment has: X drive mechanism 45, which can move in the direction of symbol 54; Y drive mechanism 46, which can move in the direction of symbol 55; and Z drive mechanism 47, which can move in the direction of symbol 56. The discharge device 25 is provided in the Z drive mechanism 47 , and the Z drive mechanism 47 is provided in the X drive mechanism 45 . Moreover, the stage 48 on which the coating object 49 is mounted is provided in the Y drive mechanism 46. As shown in FIG. By providing the above driving mechanism, the discharge device 25 can be relatively moved in the XYZ directions ( 54 , 55 , 56 ) with respect to the object 49 to be coated.
[0146] The control unit 50 supplies the compressed gas for pumping the liquid substance 20 from the compressed gas line 51 to the discharge device 25 , an...
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