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Device and method for classifying and recovering waste grinding fluid and deionized water

A technology for deionized water and grinding liquid, which is applied in the field of recycling waste grinding liquid and deionized water, and in the field of devices for sorting and recycling waste grinding liquid and deionized water, which can solve the problems of inability to separate collection and large equipment changes

Inactive Publication Date: 2012-07-25
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This solution requires the modification of the grinding turntable, which requires major changes to the equipment, and collects the mixture of grinding liquid and deionized water, which cannot be collected by classification

Method used

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  • Device and method for classifying and recovering waste grinding fluid and deionized water
  • Device and method for classifying and recovering waste grinding fluid and deionized water
  • Device and method for classifying and recovering waste grinding fluid and deionized water

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Embodiment Construction

[0036] see figure 1 As shown, the present invention provides a device for classifying and recycling waste grinding liquid and deionized water. A hollow cylindrical outer cover 12 is sleeved around the grinding turntable 11, and a grinding pad 13 is fixedly arranged on the upper surface of the grinding turntable 11, and After lifting to the corresponding height, the wafer 14 is clamped on the wafer carrier 15 and is in contact with the polishing pad 13; the liquid supply device 16 is arranged above the polishing pad 13; when the polishing turntable 11 drives the polishing pad 13 to rotate the polishing wafer At 14:00, the wafer carrier 15 drives the wafer 14 to rotate in the opposite direction to the grinding turntable 11 and applies downward pressure to increase the friction between the wafer 14 and the grinding pad 13, while the liquid supply device 16 passes through its nozzle 161. The grinding liquid is sprayed on the center part of the upper surface of the polishing pad 13...

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Abstract

The invention relates to a structure and a method for recovering waste grinding fluid in the field of semiconductor manufacturing, in particular to a structure and a method for classifying and recovering the waste grinding fluid. A plurality of collection devices are sleeved on a grinding rotary plate to distinguish different waste fluids and recover or classify the waste fluid, so that the collected waste fluid is higher in concentration, and recovery efficiency can be improved while cost is saved.

Description

technical field [0001] The present invention generally relates to a device and method for recycling waste polishing liquid and deionized water in the field of semiconductor manufacturing, and more specifically, the present invention relates to a device and method for classifying and recycling waste polishing liquid and deionized water. Background technique [0002] With the increase in the line width of semiconductor components and the increase in the number of layers, the planarization process has become indispensable, especially the polishing process has been paid more and more attention by technicians; however, the polishing liquid and deionized water used in the polishing process, Usually, they are mixed together and discharged into the pipeline. Especially when the composition of the grinding liquid is different, the discharged waste liquid is more difficult to be recycled, thereby increasing the cost of recycling, and the efficiency of recycling is also greatly reduced,...

Claims

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Application Information

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IPC IPC(8): B24B57/02
CPCY02P70/10
Inventor 张守龙白英英陈玉文
Owner SHANGHAI HUALI MICROELECTRONICS CORP