Method for manufacturing X-ray sensor
A sensor and X-ray technology, applied in the field of X-ray sensor production, can solve the problems of high product cost, low yield and low equipment capacity.
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[0036] Aiming at the problems of high product cost, low yield rate and low equipment productivity caused by too many mask exposure times in the process of manufacturing X-ray sensors in the prior art, an embodiment of the present invention provides an X-ray sensor and its production method.
[0037] The manufacturing method of the X-ray sensor provided by the embodiment of the present invention, its process is as follows image 3 shown, including the following steps:
[0038] Step S10: preparing at least two gate scanning lines on the substrate; each gate scanning line serves as a gate of a switching device included in a row of pixel units in the X-ray sensor.
[0039] Step S20: sequentially depositing a gate insulating layer, an active layer film, an ohmic contact layer film, a first conductive layer film, and a photoelectric conversion layer film on the substrate and the gate scanning line; for the active layer film, the ohmic contact layer film, the second A conductive la...
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