Manufacturing method of flow guide drum of single crystal furnace
A production method and technology of a guide tube, which is applied in the field of single crystal furnace guide tube production, can solve problems such as high cost, long production cycle, and short service life, and achieve the effects of low density, low cost, and excellent environmental protection
Inactive Publication Date: 2014-04-02
GANSU HAOSHI CARBON FIBER
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Problems solved by technology
[0005] Aiming at the disadvantages of high cost, long production cycle and short service life of the above-mentioned prior art, the purpose of the present invention is to provide a method for manufacturing a single crystal furnace guide tube
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Embodiment 1
[0031] A method for manufacturing a single crystal furnace guide tube, characterized in that it comprises the following steps:
[0032] 1) Brush the release agent on the surface of the mold. The release agent is one or a combination of molybdenum disulfide and lubricating grease. The thickness of the release agent is 0.2~1mm.
[0033] 2) 15kg, the length is 1~8mm short carbon fiber filament and fills in the mould, when filling in, appropriate tamping; Then according to adhesive agent, be 100 parts of phenolic resins, 250 parts of ethanol, 10 parts of benzenesulfonyl chloride ratios are mixed evenly, by Pour the uniformly mixed adhesive into the casting port, and start to pressurize when the adhesive flows out of the lower end of the mold, the pressure is 500~1000Mpa.
[0034] 3) Curing treatment, transfer the pressurized mold into an oven for curing treatment, quickly heat up to 180°C, take it out after 10 hours of heat preservation, naturally cool down to 50~60°C to start d...
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Abstract
The invention provides a manufacturing method of a flow guide drum of a single crystal furnace. The manufacturing method is characterized by comprising the following steps of: filling carbon-fiber short fibers, carbon-fiber powder, adhesive resin and a curing agent into a mold of a flow guide drum blank body according to a certain proportion, pressurizing, carrying out compression molding, then carrying out curing, carbonization, high-temperature treatment and machining treatment, and carrying out once coating treatment and CVD (Chemical Vapor Deposition) treatment so as to improve the self strength, the wear resistance and the oxidation resistance of the flow guide drum and prolong the service life of the flow guide drum. The raw material for manufacturing the flow guiding drum is obtained by short cutting and grinding of leftover materials of the carbon fiber material, and belongs to recycling and secondary utilization of waste; and the preparation process is simple, the equipment cost is low, and the defects of the complex equipment needed by the traditional graphite flow guiding drum and C / C composite flow guide drum are overcome. Simultaneously, compared with the graphite flow guiding drum and the C / C composite material flow guiding drum, the flow guide drum has the advantages of low heat conducting coefficient, less heat loss, lower density and easy installation and replacement.
Description
technical field [0001] A method of manufacturing a single crystal furnace guide tube Background technique [0002] When the single crystal furnace pulls single crystal silicon rods, the quartz crucible containing the polycrystalline silicon block is put into the graphite crucible holder above the crucible holder, and is heated by a graphite heater in hydrogen or nitrogen protective gas to melt the polycrystalline silicon material. When the temperature reaches the process requirements, the seeded crystal is inserted into the molten polysilicon liquid through the guide tube, so that the polysilicon is crystallized according to the order of the seeded silicon atoms and solidified into single crystal silicon. [0003] At present, the guide tube of single crystal furnace is generally made of high-purity graphite and C / C composite material, which mainly acts as a guide for high-temperature gas. That is to say, it is required to have good heat resistance, mechanical properties ...
Claims
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IPC IPC(8): B28B1/52B28B3/02C30B15/00
Inventor 郝相忠郝学兴陈超薛向军
Owner GANSU HAOSHI CARBON FIBER