Air floatation structure of separated type air foot
A split-type, air-floating technology, which is applied to bearings, shafts, bearings, mechanical equipment, etc., can solve the problems of air-foot vibration and affecting the stability of air feet, and achieve uniform gas pressure, stable air-floating pressure loss, and reduced pressure loss. The effect of small pressure loss
Active Publication Date: 2014-08-20
SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD
View PDF6 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0004] The positive pressure gas output from the air flotation hole 20e will diffuse to the periphery of the bottom surface of the air flotation structure, and a part of the positive pressure gas will diffuse to the bottom of the air foot plate 2000, which will easily cause the air foot to generate gas vibration during work. Affect the stability of air foot operation
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0027] The following will combine Figure 2 ~ Figure 6 The air flotation structure of the split air foot of the present invention is further described in detail.
[0028] see figure 2 and image 3 , a split air foot, placed on the platform ( figure 2 (not shown in the middle), the split type air foot includes an air foot plate 200, the four corners of the bottom of the air foot plate 200 are respectively provided with an air flotation structure 200a, 200b, 200c and 200d, and the air foot plate 20000 Equipped with a vacuum preload structure 1;
[0029] Optionally, the air flotation structures 200a, 200b, 200c, and 200d can be formed by processing the air foot plate 200, that is, the air flotation structures 2a, 2b, 2c, and 2d are formed with the air foot plate 200. One;
[0030] continue to see figure 2 , the vacuum preload structure 1 is connected to the air foot plate 200 in a split type, and the four connection points O1, O2, O3, and O4 of the vacuum preload structu...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention relates to an air floatation structure of a separated type air foot. The air flotation structure is positioned at the bottom of an air foot plate, and air floatation holes and air flues are formed in the air floatation structure. The air floatation holes are communicated with the air flues and are communicated with the bottom face of the air floatation structure. Positive pressure gas delivered to the air floatation holes from the air flues is output from the bottom face of the air floatation structure. The bottom face of the air floatation structure is provided with a pressure release trough which half surrounds the air floatation holes outside and prevents the positive pressure gas output from the bottom face of the air flotation structure from diffusing below the bottom of the air foot. According to the air flotation structure of the separated type air foot, higher air flotation rigidity can be obtained under greater air film thickness, the bearing capacity of the air foot is improved, air vibration during the work of the air foot can be avoided, and the stability of the air foot operation is improved.
Description
technical field [0001] The invention relates to microelectronic equipment, in particular to an air-floating structure with split-type air feet. Background technique [0002] The air foot is the key component to provide air bearing support for the precision motion table to ensure the frictionless movement of the motion table on the platform (usually a marble platform), which includes an air flotation structure and a vacuum preload structure. [0003] figure 1 Shown is the air foot plate 2000 of the air foot in the prior art, the four corners of the bottom of the air foot plate 2000 are respectively provided with an air flotation structure 20a, 20b, 20c and 20d, and each of the air flotation structures is provided with Four air flotation holes 20e, the four air flotation holes 20e are all communicated with the bottom surface of the air flotation structure, and the four air flotation holes 2'e are respectively located at the four corners of the air flotation structure, the air...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): F16C32/06
Inventor 李进春齐芊枫方洁郑椰琴夏海吴立伟
Owner SHANGHAI MICRO ELECTRONICS EQUIP (GRP) CO LTD