Positioning alignment apparatus of double-side driving workpiece platform without being connected by cross beam

Abstract

The invention relates to a positioning alignment apparatus of a double-side driving workpiece platform without being connected by a cross beam, belonging to the technical field of ultraprecision machining and detection equipment. The positioning alignment apparatus comprises two same positioning assemblies, and each positioning assembly comprises a telescopic unit, a push rod, a positioning groove and a position sensor, wherein the position sensor is used for the position detection of the double-side driving workpiece platform and supplies a positioning executing signal. The invention solves the problem that the double-side driving workpiece platform without being connected by the cross beam shifts along a Y shaft direction without being acted by driving force, prevents the structure loaded on the double-side driving workpiece platform from being damaged due to the desynchrony of the double-side driving workpiece platform and also solves the problem that the double-side driving workpiece platform is aligned on position along the Y shaft direction without being acted by the driving force. In the invention, the double-side driving workpiece platform is unnecessary to carry out alignment operation before working, thereby increasing the work efficiency.

Description

technical field [0001] The invention relates to a positioning and alignment device, in particular to a positioning and alignment device for a bilaterally driven workpiece table without beam connection, which is mainly used in semiconductor photolithography equipment and belongs to the technical field of ultra-precision processing and testing equipment. Background technique [0002] Bilaterally driven workpiece tables with high precision and high speed are widely used in modern manufacturing industries. The workpiece table driven by both sides can be divided into two types, that is, the workpiece table is connected with the beam and the workpiece table is connected without the beam. This article is aimed at the double-sided driving workpiece table without beam connection, the structure is as follows figure 1 As shown, the left and right workpiece tables are respectively driven by linear motors, and are supported and guided by air bearings. During the movement, the left and r...

AI Technical Summary

Problems solved by technology

[0003] One is that after the movement is over, the left and right workpiece tables will drift along the Y-axis direction due to external disturbance factors such as cable tension. When the drift distance exceeds the stroke of the load above the workpiece table, the left and right workpiece tables will exert torsional force on the load and tension, which in turn will destroy the structure of the load

[0004] Second, when the movement is over, if no external force is applied, the workpiece tables on both sides will drift along the Y-axis direction under the action of external forces such as cables, causing the left and right workpiece tables to move asynchronously along the Y-axis direction. The position of the workpiece table along the Y axis is no longer aligned. Before the next movement, the workpiece table on both sides must be re-aligned, which is time-consuming and reduces work efficiency.

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