Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Line width narrowing module with alignment device and excimer laser

A line width narrowing and alignment device technology, applied in the laser field, can solve the problems of multiple laser energy and loss, and achieve the effect of energy output, maximum energy output, rapid installation and replacement

Pending Publication Date: 2018-12-07
RAINBOW SOURCE LASER RSLASER
View PDF0 Cites 1 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

It can be seen that the line width narrowing module also loses more laser energy while realizing line width narrowing

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Line width narrowing module with alignment device and excimer laser
  • Line width narrowing module with alignment device and excimer laser
  • Line width narrowing module with alignment device and excimer laser

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0028] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.

[0029] see Figure 2-Figure 6 , the linewidth narrowing module with alignment device of the present invention, visible light laser 5, is used to generate visible laser light; prism group 1, is used for reflecting said visible laser light, produces reflected visible laser light; Adjust the angle of the line width narrowing module so that the reflected visible laser light is coaxial with the optical axis of the discharge cavity 3, and passes through the discharge cavity and is vertically reflected by the output coupling mirror 4 to return in the same way to complete the Alignment of the...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses a line width narrowing module with an alignment device; the line width narrowing module comprises the following parts: a visible light laser used for forming a visible laser; aprism group used for reflecting the visible laser so as to form a reflection visible laser; an angle adjusting device used for adjusting the line width narrowing module angle, enabling the reflectionvisible laser to be coaxial with the optical axis of a discharge chamber and penetrate the discharge chamber and is vertically reflected by an output coupling mirror and returned back to the same way, thus finishing the alignment between the line width narrowing module and the discharge chamber. In addition, the invention also provides an excimer laser and the line width narrowing module alignment method with the discharge chamber, and the excimer laser. The line width narrowing module can be fast mounted and replaced, thus ensuring spectrum output features and realizing maximum energy output.

Description

technical field [0001] The invention relates to the field of laser technology, in particular to a line width narrowing module with an alignment device, an excimer laser, and an alignment method between the line width narrowing module and a discharge cavity. Background technique [0002] The line width narrowing module is an important part of the excimer laser used in lithography. By cooperating with the discharge cavity, the line width narrowing module can realize functions such as spectrum narrowing and center wavelength tuning, and the fineness of the semiconductor silicon wafer chip pattern can be guaranteed through the sub-picometer line width. [0003] The method of combining the prism group 1 with the grating 2 is a widely used spectrum control method at present. figure 1 It is a schematic diagram of the basic structure of the line width narrowing module of the excimer laser system, which mainly includes the prism group 1 and the grating 2. The prism group 1 performs...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
IPC IPC(8): H01S3/00G02B7/00G02B27/42G02B27/09
CPCH01S3/0014H01S3/0057H01S3/0071G02B7/003G02B27/0972G02B27/4233
Inventor 王倩李少华赵江山周翊吴劲松辛茗江锐杨军红
Owner RAINBOW SOURCE LASER RSLASER
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products