Line width narrowing module with alignment device and excimer laser

Abstract

The invention discloses a line width narrowing module with an alignment device; the line width narrowing module comprises the following parts: a visible light laser used for forming a visible laser; aprism group used for reflecting the visible laser so as to form a reflection visible laser; an angle adjusting device used for adjusting the line width narrowing module angle, enabling the reflectionvisible laser to be coaxial with the optical axis of a discharge chamber and penetrate the discharge chamber and is vertically reflected by an output coupling mirror and returned back to the same way, thus finishing the alignment between the line width narrowing module and the discharge chamber. In addition, the invention also provides an excimer laser and the line width narrowing module alignment method with the discharge chamber, and the excimer laser. The line width narrowing module can be fast mounted and replaced, thus ensuring spectrum output features and realizing maximum energy output.

Description

technical field [0001] The invention relates to the field of laser technology, in particular to a line width narrowing module with an alignment device, an excimer laser, and an alignment method between the line width narrowing module and a discharge cavity. Background technique [0002] The line width narrowing module is an important part of the excimer laser used in lithography. By cooperating with the discharge cavity, the line width narrowing module can realize functions such as spectrum narrowing and center wavelength tuning, and the fineness of the semiconductor silicon wafer chip pattern can be guaranteed through the sub-picometer line width. [0003] The method of combining the prism group 1 with the grating 2 is a widely used spectrum control method at present. figure 1 It is a schematic diagram of the basic structure of the line width narrowing module of the excimer laser system, which mainly includes the prism group 1 and the grating 2. The prism group 1 performs...

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