Line width narrowing module with alignment device and excimer laser
A line width narrowing and alignment device technology, applied in the laser field, can solve the problems of multiple laser energy and loss, and achieve the effect of energy output, maximum energy output, rapid installation and replacement
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[0028] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.
[0029] see Figure 2-Figure 6 , the linewidth narrowing module with alignment device of the present invention, visible light laser 5, is used to generate visible laser light; prism group 1, is used for reflecting said visible laser light, produces reflected visible laser light; Adjust the angle of the line width narrowing module so that the reflected visible laser light is coaxial with the optical axis of the discharge cavity 3, and passes through the discharge cavity and is vertically reflected by the output coupling mirror 4 to return in the same way to complete the Alignment of the...
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