Vacuum chamber electrode extraction device

Abstract

The invention provides an electrode lead-out device of a vacuum chamber, which comprises a lead-out device base, an internal electrode and an electrode fixing and locking cap; the base is in sealed connection with the outer side surface of the chamber bottom plate of the vacuum chamber, a through hole is formed inside, and a shoulder is formed in the through hole; an upper convex shoulder and a lower convex shoulder are formed between both ends of the internal electrode, the chamber lead-out end of the internal electrode penetrates through the through hole of the base without being contacted; a first O-shaped seal ring is clamped between the upper convex shoulder and the shoulder; the locking cap is fixedly arranged on the base, and is provided with a limit pipe which extends into the through hole; a second O-shaped seal ring is clamped between the end of the limit pipe and the lower convex shoulder; and the external lead-out end of the internal electrode penetrates through the limit pipe without being contacted. Because the electrode lead-out device of the vacuum chamber is arranged outside the vacuum chamber, the device is not affected by high temperature in the chamber, a double-seal ring structure is adopted to replace an original metal seal and insulation structure, so that the structural cost and the maintenance cost are saved.

Description

technical field [0001] The present invention relates to industries such as flat panel display (TFT-LCD and AMOLED), semiconductor, solar energy, etc., and particularly relates to a structure for leading heater electrodes out of a vacuum chamber in a high-vacuum environment. The power supply of other electrical appliances is drawn out. Background technique [0002] The heating system in the vacuum equipment chamber requires a special structure of the electrode lead-out device to lead the power line out of the chamber. This structure must not only ensure the vacuum sealing effect, but also ensure the insulation between the cable and the metal chamber. In addition, heaters are consumable items that need to be replaced periodically. The usual electrode lead-out device is designed with a special structure for the heater port, which not only ensures the metal seal with the end of the lead-out device, but also ensures the insulation treatment inside the heater. [0003] Such as ...

AI Technical Summary

Problems solved by technology

[0008] In view of the deficiencies of the prior art, the object of the present invention is to provide a vacuum chamber electrode lead-out device, which is applied to all equipment that needs to be heated in the chamber under high-vacuum environments, and solves the problems of vacuum sealing and insulation when the power line of the heating system is led out

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