Computer-generated hologram-based aspheric surface absolute detection method
A technology of absolute detection and computational holography, applied in the field of optical measurement, it can solve the problems of large influence of alignment error and cumbersome steps, and achieve the effect of ingenious conception, simple structure and large-scale engineering application value.
Active Publication Date: 2015-06-17
INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI
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However, this method requires a total of seven steps of measurement, the steps are cumbersome, and the alignment error of each measurement has a great impact on it
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[0026] Figure 1-Figure 3 is a schematic diagram of the three measurements required in the present invention. exist figure 1 and figure 2 In , the beam from the interferometer 1 passes through the standard lens 2 and enters the CGH 1 3 or CGH 2 4, the CGH changes the spherical wavefront into an aspheric wavefront to realize the measurement of the measured aspheric mirror 5; image 3 In , the beam from the interferometer 1 passes through the standard lens 2 and enters the CGH 1 3 on, CGH 1 Spherical wavefront to aspheric wavefront, then incident to the CGH 2 4, which changes the aspheric wavefront into a spherical wavefront to realize the measurement of the reference spherical mirror 6. Combined with an example, the measurement process is as follows:
[0027] The steps of the absolute measurement method of an aspheric surface are as follows:
[0028] The first step, according to figure 1 As shown, the CGH 1 3 placed in the front focus position of interferometer 1, u...
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The invention provides a computer-generated hologram-based aspheric surface absolute detection method which comprises an interferometer, a standard lens, a CGH1 (computer generated hologram 1), a CGH2, an aspherical mirror to be detected and a reference spherical mirror. The method comprises the following steps of: firstly, detecting the surface form of the aspherical mirror to be detected by the CGH1, wherein a detection result comprises system error, the error of the CGH1, and the error of the aspherical mirror to be detected; detecting the surface form of the aspherical mirror to be detected by the CGH2, wherein a detection result includes system error, the error of the CGH2, and the error of the aspherical mirror to be detected; and detecting the surface form of the reference spherical mirror by the common function of the CGH1 and the CGH2, wherein a detection result comprises system error, the error of the CGH1, the error of the CGH2 and the error of the reference spherical mirror. The system error and the error of the reference spherical mirror can be calibrated in advance, so that the error of the CGH1 and the CGH2 can be respectively obtained through triple detection, and the absolute detection result of the aspherical mirror to be detected can be obtained. The method is ingenious to design, and simple in structure, an effective method for the absolute detection of the aspheric surface can be provided, and the method is higher in engineering application value.
Description
technical field [0001] The invention belongs to the technical field of optical measurement, and in particular relates to an absolute detection method of an aspheric surface. Background technique [0002] With the continuous development of modern optics, the application of aspheric surface is more and more extensive. In the detection of aspheric surfaces, the method of relative measurement is mostly used, that is, the measurement results include system errors and errors of the reference surface. If you want to obtain more accurate surface shape information of the aspheric surface, you need to use absolute detection. Absolute detection of aspheric surface, that is, to remove the influence of system error and reference surface error on the measurement result by a certain method, so that the measurement result only includes the error information of the aspheric surface. [0003] At present, there are relatively few methods for absolute detection of aspheric surfaces, and the m...
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IPC IPC(8): G01B11/24G01M11/00
Inventor 陈强李世杰吴高峰万勇建侯溪
Owner INST OF OPTICS & ELECTRONICS - CHINESE ACAD OF SCI