Air floatation follow-up device based on nozzle jet force compensation and used for eliminating inertia force influence
A follow-up device and inertial force technology, applied in bearing assembly, bearings, bearing components, etc., can solve the problems of inability to eliminate the influence of inertial force, low control accuracy, etc., to reduce quality, ensure consistent follow, and reduce influence. Effect
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[0015] The present invention will be further described below in conjunction with the accompanying drawings.
[0016] refer to figure 1 and figure 2 , including an air bearing shaft 10 and an air bearing sleeve 2, the air bearing sleeve 2 is set on the air bearing shaft 10, there are two air bearing sleeves 2, and the air bearing sleeves 2 are sealed with the air storage sleeve 1 connected, the mounting base 8 is installed at both ends of the air bearing shaft 10, the air storage sleeve 1 and the air bearing sleeve 2 constitute an air bearing follower, and the air float follower passes through the lanyard 12 Follow-up with the moving part 13; the air-floating follow-up device that eliminates the influence of inertial force also includes a long-distance linear guide rail 6, and the long-distance linear guide rail 6 is installed on both sides of the I-beam 17, and slides are installed on the I-beam 17. platform 5, the sliding platform 5 is fixedly connected with the mounting s...
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