Exhaust method, exhaust apparatus and substrate treatment equipment
A technology of substrate processing equipment and exhaust method, applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve the problem of increasing equipment design and manufacturing costs, pollution, substrate holding part and partition structure Complicated problems, to achieve the effect of improving uniformity and providing uniformity
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[0050] In order for those skilled in the art to better understand the technical solution of the present invention, the exhaust method, device and substrate processing equipment provided by the present invention will be described in detail below with reference to the accompanying drawings.
[0051] The exhaust method provided by the present invention is used to cooperate with the substrate processing chamber to perform exhaust operation. see figure 1 , is a schematic flow chart of the exhaust method provided by the present invention.
[0052] The method comprises the following steps: 10) providing at least two exhaust ports for the substrate processing chamber, and making the exhaust rate of each exhaust port independently controllable; 20) making the at least two exhaust ports operate at different Exhaust rate Exhaust outward. In this way, with the help of the above-mentioned at least two exhaust ports whose exhaust rates can be independently controlled, airflows in multiple...
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