Explosion-proof source bottle for diffusion technology

A diffusion process and source bottle technology, applied in the directions of diffusion/doping, crystal growth, post-processing, etc., can solve the problems of blockage of the gas outlet pipeline, explosion of the source bottle, high danger, etc., and achieve the effect of avoiding danger.

Inactive Publication Date: 2013-01-02
ZHEJIANG FORTUNE ENERGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

But if the inlet and outlet pipes are reversed, or N 2 Excessive air intake pressure, or blockage of the air outlet pipeline, can easily lead to excessive air pressure in the source bottle, which will cause the source bottle to explode
while POCl 3 Highly toxic, volatile, severely corrosive to the skin, and extremely dangerous after a burst bottle leaks

Method used

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  • Explosion-proof source bottle for diffusion technology
  • Explosion-proof source bottle for diffusion technology

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Embodiment Construction

[0010] Below in conjunction with accompanying drawing, the technical scheme of the patent of the present invention is described in further detail.

[0011] Such as figure 2 As shown in the figure, an explosion-proof source bottle for the diffusion process is composed of an air inlet pipe, an air outlet pipe, a temperature measuring pipe, a metal block, and a buzzer. When the inlet pipe A is fed with nitrogen gas, the liquid phosphorus oxychloride D enters the furnace cavity from the outlet pipe B along with the small nitrogen carrying source, and the process of diffusion reaction begins. Install a metal block on the top of the explosion-proof source bottle. When the air pressure in the bottle is too high, the metal block is lifted to release the pressure, the circuit is turned on, and the buzzer alarms; when the air pressure is restored, the metal block falls, and the buzzer stops alarming. .

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PUM

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Abstract

The invention discloses an explosion-proof source bottle for a diffusion technology. The explosion-proof source bottle for the diffusion technology comprises an air inlet pipe, an air outlet pipe, a temperature measuring pipe, a metal block and a buzzer, wherein through the design of automatic pressure-relieving and alarming functions, a metal block pressure relief device is additionally arranged on the source bottle, so that when air pressure in the source bottle is too high, the metal block is ejected to relieve pressure, a circuit is switched on and the buzzer alarms, and when the air pressure is restored, the metal block falls down and the buzzer stops alarming. The explosion-proof source bottle for the diffusion technology has the advantage as follows: when the air pressure in the source bottle is too high, the air pressure is automatically relieved and people are informed of checking by alarming, so that the danger caused by explosion of the source bottle is successfully avoided.

Description

technical field [0001] The invention relates to equipment used in a liquid source diffusion process in a solar cell sheet preparation process, in particular to an explosion-proof source bottle used in the diffusion process. Background technique [0002] Semiconductor industries such as solar energy and integrated circuits need to use liquid POCl 3 Do phosphorus source diffusion to form a PN junction. The phosphorus source is placed in a diffusion source bottle. Usually, the basic structure of the source bottle is composed of an air outlet pipe, an air inlet pipe, a temperature measuring tube and a source bottle; the bottom of the source bottle is a structure with slightly curved ends and a flat bottom, such as figure 1 shown. Liquid POCl in the source bottle 3 , the N 2 Liquid POCl 3 , carrying gaseous POCl 3 Enter the diffusion furnace to complete the phosphorus diffusion process. But if the inlet and outlet pipes are reversed, or N 2 Excessive air intake pressure o...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B31/16
Inventor 方智王庆钱
Owner ZHEJIANG FORTUNE ENERGY
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