On-line automatic detection device for silicon wafer

An automatic detection device and silicon wafer technology, applied in the direction of testing moving boards, sorting, etc., can solve the problems of easy debris, low detection efficiency, high labor costs, etc., and achieve the effect of low cost and high efficiency

Inactive Publication Date: 2013-01-16
ZHANGJIAGANG ULTRASONIC & ELECTRIC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0002]Silicon wafers are generally thin, and fragments are prone to occur during the process of slitting, cleaning or transportation. Subsequent applications can only be carried out after fragment inspection. In t

Method used

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  • On-line automatic detection device for silicon wafer
  • On-line automatic detection device for silicon wafer
  • On-line automatic detection device for silicon wafer

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Embodiment Construction

[0020] Below in conjunction with the embodiment shown in the accompanying drawings, the present invention is described in detail as follows:

[0021] as attached figure 1 and attached figure 2 As shown, the silicon wafer online automatic detection device of the present invention is used to detect whether a number of silicon wafers 2 transmitted synchronously and sequentially with the transmission line 1 are fragments and sort the fragments from the transmission line 1. The structure includes a detection device arranged above the transmission line 1 Unit 3, the control unit 4 connected with the detection unit 3 signal and the sorting unit 5 connected with the control unit 4 signal, the detection unit 3 includes a first detection piece for detecting whether there is a silicon chip 2 on the transmission line 1 at present, for Detect that the corresponding current silicon wafer 2 is a second detection piece of a fragment or a complete piece; the sorting unit 5 includes a s...

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Abstract

The invention discloses an on-line automatic detection device for a silicon wafer, which is used for detecting whether a plurality of silicon wafers synchronously and successively conveyed along with a transmission line are fragments, and the fragments are sorted from the transmission line. The on-line automatic detection device for the silicon wafer comprises a detection unit, a control unit and a sorting unit, wherein the detection unit is arranged above the transmission line; the control unit is in signal connection with the detection unit; the sorting unit is in signal connection with the control unit; an optical fiber sensor is adopted in the detection unit; and the control unit is used for controlling the sorting unit to sort the fragments according to the detection signal of the detection unit. The fragments in the silicon wafer can be detected by the optical fiber sensor, and the fragments are sorted by controlling the sorting unit. With the method, most fragments in the silicon wafers conveyed on line can be sorted. The on-line automatic detection device for a silicon wafer has the advantages of simple structure, low cost and obvious effect and lays a foundation for subsequent scanning so as to efficiently and quickly sort fragments.

Description

technical field [0001] The invention relates to an on-line automatic detection device for silicon wafers. Background technique [0002] Silicon wafers are generally thin, and fragments are prone to occur during the process of slitting, cleaning or transportation. Subsequent applications can only be carried out after fragment inspection. Fragmented silicon wafers are tested, which often requires high labor costs, and the detection efficiency is very low. Contents of the invention [0003] In view of the above-mentioned technical deficiencies, the purpose of the present invention is to provide a silicon wafer online automatic detection device for rough inspection of fragments in the silicon wafer. [0004] In order to solve the problems of the technologies described above, the present invention adopts the following technical solutions: [0005] An online automatic detection device for silicon wafers, which is used to detect whether a number of silicon wafers transmitted sy...

Claims

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Application Information

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IPC IPC(8): B07C5/342B07C5/36G01N21/86
Inventor 陈宏
Owner ZHANGJIAGANG ULTRASONIC & ELECTRIC
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