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Silicon carbide crystal growth furnace control system

A crystal growth furnace and control system technology, applied in the direction of electrical program control, sequence/logic controller program control, etc., can solve the problem of high cost, achieve the effect of reducing production cost and improving work efficiency

Active Publication Date: 2016-02-17
BEIJING SEVENSTAR ELECTRONICS CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] At present, industrial automation control generally adopts PLC control. PLC is oriented to direct control and is mainly used for large-scale equipment. It is easy to develop and high in cost.

Method used

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  • Silicon carbide crystal growth furnace control system
  • Silicon carbide crystal growth furnace control system
  • Silicon carbide crystal growth furnace control system

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Embodiment Construction

[0024] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. The following examples are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0025] The ARM (Advanced RISC Machines) controller is the first RISC microprocessor designed by Acorn Computer Co., Ltd. for the low-budget market. It was earlier called AcornRISCMachine.

[0026] figure 1 It is a structural schematic diagram of the silicon carbide crystal growth furnace control system of the present invention, as figure 1 As shown, the present invention provides a silicon carbide crystal growth furnace control system, including: ARM controller 1 and a pressure controller 2 controlled by the ARM controller, a temperature controller 3, a motion controller 4 and an alarm 5;

[0027] Pressure controller 2: collect the pressure data in the furnace and send ...

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Abstract

The invention discloses a silicon carbide crystal crystal growing furnace control system comprising an ARM (Advanced RISC Machines) controller as well as a pressure controller, a temperature controller, a motion controller and an alarm which are controlled by the ARM controller, wherein the pressure controller is used for collecting furnace pressure data and sending the pressure data to the ARM controller; the temperature controller is used for collecting furnace temperature values and sending the temperature values to the ARM controller; the motion controller is used for controlling the up-and-down movement of a heater coil and a crucible shaft; and the alarm is used for alarming when the temperature and the pressure exceed the range of the set values. The silicon carbide crystal crystal growing furnace control system disclosed by the invention is capable of effectively improving the work efficiency of a growing furnace and reducing the production cost.

Description

technical field [0001] The invention relates to the technical field of growth furnaces, in particular to a silicon carbide crystal growth furnace control system. Background technique [0002] At present, industrial automation control generally adopts PLC control. PLC is oriented to direct control and is mainly used for large-scale equipment. It is simple to develop and high in cost. However, ARM is biased towards weak current control, and its strength can only be exerted after installing an operating system. Most of them are used in consumer electronics products, which are difficult to develop and low in price. With the development of industrial technology, the boundaries between these controllers are becoming more and more blurred. Choose the appropriate controller according to the actual work requirements. Contents of the invention [0003] (1) Technical problems to be solved [0004] The technical problem to be solved by the present invention is to provide a control ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G05B19/05
Inventor 黄鸣丁文革谭三成
Owner BEIJING SEVENSTAR ELECTRONICS CO LTD