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High and low temperature vacuum calibrating device and method

A technology of calibration device and calibration method, which is applied in the field of measurement, can solve problems such as unconsidered, unsatisfactory, large measurement uncertainty, etc., and achieve the effect of reducing measurement uncertainty and improving calibration accuracy

Active Publication Date: 2013-02-27
NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The shortcoming of this system is that the device does not take into account the influence of the temperature change of the working environment on the indication value of the vacuum gauge. -4 Pa~1×10 5 Accurate calibration of the vacuum gauge at different temperature points within the temperature range of -140°C to +100°C in the Pa range
When the calibrated vacuum gauge is used in different working environments, it will cause a large measurement uncertainty

Method used

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  • High and low temperature vacuum calibrating device and method
  • High and low temperature vacuum calibrating device and method

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Embodiment 1

[0029] Such as figure 1 As shown, a high and low temperature vacuum calibration device includes: a standard vacuum gauge 1, a tee connector 2, a calibrated vacuum gauge 3, a high and low temperature vacuum calibration chamber 4, a monitoring vacuum gauge 5, a temperature control board 6, Refrigeration system 7, air extraction unit 8, valve 9, air supply system 10, fine-tuning valve 11;

[0030] The three-way connector 2 includes three open ends of A, B, and C, wherein, the C end is the air intake end, and the C end is located in the middle of the straight pipe between the A end and the B end, perpendicular to the straight pipe, and the C end is connected to the straight pipe. The distances between the two ends of A and B are equal, and the inner diameters of both ends of A and B are equal, which can ensure that after the gas enters the tee connector 2 from the C end, the pressure flowing to the two ends of A and B is equal. The A end is connected to the standard vacuum gauge 1...

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Abstract

The invention discloses a high and low temperature vacuum calibrating device and a high and low temperature vacuum calibrating method and belongs to the field of measurement. The device comprises a standard vacuum gauge, a three-way connecting piece, a calibrated vacuum gauge, a high and low temperature vacuum calibrating chamber, a monitoring vacuum gauge, a temperature control board, a refrigerating system, an air-bleed set, a valve, a gas supply system and a micrometering valve. According to the device and the method, the accurate calibration of the vacuum gauge at different temperature points in a temperature range of minus 140 DEG C to 100 DEG C in a range of 1*10<-4>Pa to 1*10<5>Pa can be implemented.

Description

technical field [0001] The invention relates to a high and low temperature vacuum calibration device and method, especially to achieve a vacuum degree of 1×10 -4 Pa~1×10 5 The invention relates to a device and method for accurately calibrating a vacuum gauge within the range of Pa and temperature within the range of -140 DEG C to +100 DEG C, belonging to the field of measurement. Background technique [0002] Vacuum gauges are widely used in various fields of industrial production, and the research on calibration technology of vacuum gauges is an important research direction in the field of vacuum measurement. The document "Li Zhenghai. Method for Calibrating Vacuum Gauge with Composite Vacuum Standard. Vacuum and Low Temperature 3 (2), 1997." introduces a typical calibration device and method currently used in vacuum gauge calibration. The composite vacuum standard device adopts the method of combining dynamic and static, and combines three methods of calibrating vacuum g...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01L27/00
Inventor 孙雯君冯焱成永军赵澜马奔马亚芳
Owner NO 510 INST THE FIFTH RES INST OFCHINA AEROSPAE SCI & TECH
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