Two-dimensional large-diameter transmission-type quick reflecting mirror

A transmissive, reflective mirror technology, applied in the control, installation, optics and other directions using feedback, can solve the problem of inability to achieve beam position offset correction, blocking, etc., and achieve increased shear resistance, convenient implementation, and simple structure. Effect

Inactive Publication Date: 2013-03-20
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0003] In order to overcome the deficiencies of existing reflection-type fast mirrors that are obstructed in the center and unable to realize beam position offset correction, and to realize the application of fast mirrors in the fields of precise

Method used

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  • Two-dimensional large-diameter transmission-type quick reflecting mirror
  • Two-dimensional large-diameter transmission-type quick reflecting mirror
  • Two-dimensional large-diameter transmission-type quick reflecting mirror

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Embodiment Construction

[0026] refer to Figure 1-8 , the two-dimensional large-diameter transmissive fast mirror of the present invention includes: a support base 1, a mirror body support plate 2, a beam combining mirror 3, a mirror body pressing block 4, a first driver assembly 5a, a first flexible hinge 6a, a second The second driver assembly 5b, the second flexible hinge 6b, the third driver assembly 5c, and the third flexible hinge 6c. Wherein, the driver assembly 5 is composed of three parts: an oval elastic outer frame 51 , a piezoelectric ceramic 52 and a resistance strain gauge 53 . The piezoelectric ceramic 52 is embedded in the elliptical elastic outer frame 51 through the pre-tightening force, and the resistance strain gauge 53 is bonded to the outside of the piezoelectric ceramic 52 for indirect measurement of the expansion and contraction length of the piezoelectric ceramic 52 . Static support holes 511 and movable support holes 512 are distributed on the oval elastic outer frame 51. W...

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Abstract

The invention relates to a two-dimensional large-diameter transmission-type quick reflecting mirror, which comprises a support base, a mirror body support plate, a beam combiner, mirror body briquettes, three driver assemblies and three flexible hinges. The two-dimensional large-diameter transmission-type quick reflecting mirror achieves vertical changing of a driving direction of a piezoelectric ceramic driver through an elliptical elastic outer frame; compared with the direct driving mode of piezoelectric ceramics, the shear resistance of the driver is improved greatly; in addition, a stroke of the driver is amplified by 2-4 times; center transmission of the quick reflecting mirror is achieved by the three-point dispersing flexible support; the quick reflecting mirror can be applied to precise beam combining and alignment of laser lights with different wave bands at a structure principle level; and as the beam combiner can translate along a Z axis, the quick reflecting mirror can adjust a light beam deviation position. As a resistance-type strain gauge is adopted to indirectly measure a deflection angle of the beam combiner, the quick reflecting mirror is simple in structure and convenient to realize; and the miniaturization of the two-dimensional large-diameter transmission-type quick reflecting mirror is facilitated.

Description

technical field [0001] The invention relates to a fast reflection mirror, in particular to a two-dimensional large-diameter transmission fast reflection mirror which is driven by piezoelectric ceramics and can be used for precise beam combining and alignment of different waveband lasers. Background technique [0002] The Chinese invention patent "Patent No. ZL 200910078258.2" discloses a fast mirror driven by a voice coil motor and flexibly supported by a flexible shrapnel in the center. The effective load of the device is a flat mirror, which mainly corrects the propagation direction of the light beam through reflection, but is powerless to the positional deviation of the light beam. Moreover, the core support of this type of fast mirror is located at the center of the device, that is, there is a large area of ​​occlusion in the center of the device. Therefore, it is impossible to drive the beam combiner to realize the precise beam combining and alignment functions of laser...

Claims

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Application Information

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IPC IPC(8): G02B7/198G02B7/182G02B7/183G05D3/12
Inventor 徐新行韩旭东刘长顺王兵
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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