Two-dimensional transmissive fast reflecting mirror

A transmissive and reflective mirror technology, which is applied in the control, installation, and optics of using feedback, can solve the problem of not being able to drive the beam combiner to combine and align the laser beam accurately, so as to increase the shear resistance and facilitate implementation , the effect of simple structure

Inactive Publication Date: 2013-03-20
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

Since the core support of the fast mirror is located at the center of the device, that is, there is a large area of ​​occlusion in the center of the device, therefore, the beam combiner cannot be driven to achieve precise beam combining and alignment of lasers of different wavelengths

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  • Two-dimensional transmissive fast reflecting mirror
  • Two-dimensional transmissive fast reflecting mirror
  • Two-dimensional transmissive fast reflecting mirror

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Embodiment Construction

[0024] refer to Figure 1-7 , the two-dimensional transmissive fast reflection mirror of the present invention includes: a support base 1, a mirror body support plate 2, a beam combining mirror 3, a mirror body pressing block 4, a first driver assembly 5a, a first flexible hinge 6a, a second driver Assembly 5b, second flexible hinge 6b, third actuator assembly 5c, third flexible hinge 6c, fourth actuator assembly 5d, fourth flexible hinge 6d. Wherein, the driver assembly 5 is composed of three parts: an oval elastic outer frame 51 , a piezoelectric ceramic 52 and a resistance strain gauge 53 . The piezoelectric ceramic 52 is embedded in the elliptical elastic outer frame 51 through the pre-tightening force, and the resistance strain gauge 53 is bonded to the outside of the piezoelectric ceramic 52 for indirect measurement of the expansion and contraction length of the piezoelectric ceramic 52 . Static support holes 511 and movable support holes 512 are distributed on the oval...

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Abstract

The invention relates to a two-dimensional transmissive fast reflecting mirror which comprises a support pedestal, a mirror body support plate, a beam combiner, mirror body pressing blocks, four driver assemblies and four flexible hinges. According to the two-dimensional transmissive fast reflecting mirror, the vertical transition of a piezoelectric ceramic driver in the driving direction is achieved through elliptic elastic outer frames; compared with a connection mode of direct driving of piezoelectric ceramics, the shear resistance of the driver is improved greatly, and the stroke of the driver is amplified by 2-4 times; four-point disperse flexible supporting achieves central permeation of the fast reflecting mirror; the fast reflecting mirror can be used for precise beam combination and alignment of laser with different wave bands from a structure principle; a deflection angle of the beam combiner is indirectly measured by a resistance strain gauge; the fast reflecting mirror is simple in structure and convenient to realize; and the miniaturization of the two-dimensional transmissive fast reflecting mirror is facilitated.

Description

technical field [0001] The invention relates to a fast reflection mirror, in particular to a two-dimensional transmissive fast reflection mirror which is driven by piezoelectric ceramics and can be used for precise beam combining and alignment of different waveband lasers. Background technique [0002] The Chinese invention patent "Patent No. ZL 200910078258.2" discloses a fast mirror driven by a voice coil motor and flexibly supported by a flexible shrapnel in the center. The effective load of the device is a flat mirror, which mainly corrects the propagation direction of the beam through reflection. Since the core support of the fast mirror is located at the center of the device, that is, there is a large area of ​​occlusion in the center of the device, the beam combiner cannot be driven to achieve precise beam combining and alignment of lasers of different wavelengths. Contents of the invention [0003] In order to overcome the lack of shading in the center of the exis...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B7/198G02B7/182G02B7/183G05D3/12
Inventor 徐新行时魁陈宁王兵
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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