Continuous winding sputter coating machine
A coating machine and sputtering technology, which is applied in the field of continuous winding sputtering coating machine, can solve the problems of increasing the diameter of the cylindrical vacuum chamber, different requirements for the working atmosphere of the difficult-to-function film layer, increasing the volume and cost of the whole machine, etc. Achieve the effect of reducing equipment cost, good atmosphere isolation effect, and reducing equipment volume
Active Publication Date: 2015-04-08
深圳市锦瑞新材料股份有限公司
View PDF3 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0004] A common point of existing equipment of this type is that all cathode systems are installed on the inner wall of a cylindrical vacuum chamber, and each cathode is basically under the same atmospheric condition. The main technical defect is: the working atmosphere of each cathode is mutually It is difficult to realize the different requirements for the working atmosphere when plating different functional film layers
refer again figure 1 , some equipment proposed the structure 001 of "indoor small cavity", that is, baffles are set around the cathode to surround the cathode in the middle, forming a "local" atmosphere. The actual use effect is not ideal, and the cylindrical vacuum chamber is greatly increased. The diameter of the body increases the volume and cost of the whole machine
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0024] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0025] refer to Figure 2-3 , the first embodiment of the present invention is a continuous winding sputtering coating machine, including a vacuum coating chamber 101, and also includes a cathode chamber 102, the opening of the cathode chamber 102 directly communicates with the vacuum coating chamber 101, and the cathode chamber 102 protrudes outside the side wall of the vacuum coating chamber 101; the side wall of the cathode cell 102 has a cooling plate 106, and the cooling plate 106 has a water pipe 107 communicated with the cooling device, and the cooling device can be cold water in the prior art It should be understood that as a simple modification of this embodiment, the cooling plate can also be omitted, and the water pipe can be directly arranged in the side wall of the cathode chamber. It should also be understood that, as an alternative to this emb...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention relates to vacuum coating equipment, and particularly relates to a continuous winding sputter coating machine which comprises a vacuum coating chamber and a cathode cabinet, wherein the opening of the cathode cabinet is directly communicated with the vacuum coating chamber; the cathode cabinet is protruded out of the side wall of the vacuum coating chamber; the side wall of the cathode cabinet is provided with a cooling plate; and a water pipe communicated with a refrigerating device is arranged in the cooling plate. The continuous winding sputter coating machine provided by the invention has favorable atmosphere isolation effect, small volume and low manufacturing cost.
Description
technical field [0001] The invention relates to vacuum coating equipment, in particular to a continuous winding sputtering coating machine. Background technique [0002] The continuous winding sputtering coating machine has been widely used in the field of industrial production. It is mainly used to deposit metal and metal oxide media on flexible substrates such as PETfilm to form various composite thin film materials with a specific function, such as: Heat insulation films for automobiles and building glass, ITO / PET transparent conductive films, etc. The equipment has a high degree of technical integration, closely cooperates with the process, and is difficult to manufacture. Many practical equipment have their uniqueness in structure or process configuration. [0003] The main structure of this type of equipment includes a cylindrical metal vacuum chamber, refer to figure 1 The core working mechanism of the equipment—the sputtering cathode system is arranged longitudinal...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C23C14/56
Inventor 金烈
Owner 深圳市锦瑞新材料股份有限公司