Electrode of heating device for zone melting furnace

Abstract

The invention provides an electrode of a heating device for a zone melting furnace, which relates to the technical field of electric heating, and solves the problems that the output efficiency of electrodes in the conventional heating device is low, and the security of a zone melting furnace is reduced since the arc discharge phenomenon is easy to generate among the electrodes. According to the electrode provided by the invention, an electrode insulating sleeve can electrically insulate a columnar body from a first lower electrode head, an electrode cylinder and a first electrode flange, a first electrode insulating sheet is arranged between the first lower electrode head and a second lower electrode head, and a second electrode insulating sheet is arranged between the first electrode flange and a second electrode flange, so that a first electrode and a second electrode can be electrically insulated from each other through a solid insulating material. Therefore, the electrode has a good insulating property and avoids the arc discharge phenomenon. Furthermore, the electrode cylinder is arranged inside the insulating sleeve, so that the electrode cylinder is insulated from the zone melting furnace. Therefore, the security of the zone melting furnace is improved, the output consumption of a high-frequency power source can be reduced to the greatest extent, and the output power of the high-frequency power source is improved. The electrode provided by the invention is mainly applied to the zone melting furnace for implementing purification and crystal growth of silicon materials.

Description

Technical field

[0001] The invention relates to the technical field of electric heating, in particular to an electrode of a zone furnace heating device. Background technique

[0002] The zone melting furnace is an equipment that uses the suspension zone melting technology to purify silicon materials and grow single crystal silicon in the suspension zone melting zone under a vacuum inert gas environment. It is used to produce pollution-free, high resistance, long life, high purity semiconductor materials.

[0003] The zone melting furnace uses high-frequency induction heating to heat the raw materials. The heating device includes an induction coil. The two ends of the induction coil are respectively connected to the high-frequency power supply cabinet through electrodes. The heating coil is heated by the high-frequency power supply cabinet and the conduction of the electrodes. , Thereby heating the raw materials. In traditional electrodes, the thickness of the electrode flange conn...

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