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Developing spray nozzle

The technology of a nozzle and a liquid spraying tube is applied in the field of developing nozzles, which can solve the problems of high processing cost and poor spraying effect of the developer, and achieve the effects of low processing cost, good spraying effect and convenient cleaning.

Inactive Publication Date: 2013-04-03
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a developing nozzle for the technical defects of high processing cost and poor developer spraying effect existing in the existing developing nozzle

Method used

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  • Developing spray nozzle
  • Developing spray nozzle
  • Developing spray nozzle

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Embodiment Construction

[0017] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0018] refer to Figure 1 ~ Figure 4 , the developing nozzle of this embodiment includes a bar-shaped base 3 and an upper shell 1 arranged oppositely, and several liquid spray pipes 7, the bar-shaped base 3 and the upper shell 1 enclose a cavity 8, and the upper shell 1 is provided for giving the cavity 8. The nozzle 11 for liquid supply, the base 3 is provided with several stepped through-holes 31 communicating with the cavity 8, and several liquid spray pipes 7 are respectively installed in several stepped through-holes 31, and the liquid spray pipe 7 includes a pipe body 71 and the tube base portion 72 at one end of the tube body portion 71, the tube body portion 71 and the tube base portion 72 are respectively placed in the small diameter hole portion and the large diameter hole portion of the stepped through hole 31, and the tube base portion 72 an...

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Abstract

A developing spray nozzle comprises a bar-shaped base and an upper shell which are oppositely arranged, as well as a plurality of liquid spraying pipes, wherein the base and the upper shell form a cavity in a surrounded manner; a connecting nozzle for supplying liquid to the cavity is arranged on the upper shell; a plurality of step-type through holes communicated with the cavity are formed on the base; the liquid spraying pipes are installed inside the step-type through holes respectively; each liquid spraying pipe comprises a pipe body part and a pipe base part at one end of the pipe body part; the pipe body parts and the pipe base parts are arranged on small-radius hole parts and large-radius hole parts of the step-type through holes respectively; sealing rings and sleeves are arranged between the pipe base parts and large-radius hole parts; and the base is provided with pressing plates for pressing the sleeves so as to enable the sealing rings to deform. The developing spray nozzle can realize a liquid spraying pipeline with a ratio of pit-depth to pit-diameter, is low in machining cost, can avoid burrs inside the pipeline and has a good the spraying effect of developing liquid.

Description

technical field [0001] The invention relates to a developing device in the manufacturing process of an integrated circuit chip, and more particularly relates to a developing nozzle for spraying developing solution. Background technique [0002] The application of the existing developer is generally to drop the developer on the wafer, and then spread the developer by rotating the wafer; or scan the wafer with a row of hole nozzles whose length is approximately equal to the diameter of the wafer. spraying. The former is likely to cause uneven film thickness of the developer, resulting in development defects, and it is easy to waste the developer during the wafer rotation process. The latter is a mature and commonly used developing nozzle, but due to the structure of this type of hole nozzle, there are often Holes with a relatively large depth and diameter are also due to: At present, the hole row nozzles are generally made of Teflon materials, such as PVDF, PPS, etc., which a...

Claims

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Application Information

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IPC IPC(8): G03F7/30B05B1/14
Inventor 刘学平王汉向东牟鹏段广洪
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV