Wafer conveying mechanical arm testing device
A technology of testing devices and manipulators, applied in measuring devices, testing of machines/structural components, instruments, etc., can solve problems such as waste of manpower and material resources
Active Publication Date: 2015-07-15
北京京仪仪器仪表研究总院有限公司
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This results in a lot of waste of manpower and material resources
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[0014] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments.
[0015] Such as figure 1 , figure 2 As shown, the present invention includes a support 1, a test hand fork 2, a type of wafer vibration sensor 3 and a control system (not shown in the figure).
[0016] The bracket 1 of the present invention includes a column 12 fixedly connected to the base 11, the upper part of the column 12 is connected to an upper connecting rod 14 through a locking member 13, and the lower part of the column 12 is connected to the lower connecting rod 15 through another locking member 13 . The horizontal height of the upper and lower connecting rods 14, 15 on the column 12 can be adjusted by releasing the locking member 13. The extending end of the upper connecting rod 14 is connected to a displacement sensor 16 through the locking member 13 ; the extending end of the lower connecting rod 15 is connected to an image sensor 17 t...
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The invention relates to a wafer conveying mechanical arm testing device. The wafer conveying mechanical arm testing device is characterized by comprising a support, a testing hand fork, a similar wafer shock sensor and a control system. The support comprises a vertical column, the vertical column is connected with an upper connecting rod and a lower connecting rod horizontally, the upper connecting rod is provided with a displacement sensor, the lower connecting rod is provided with an image sensor, and the displacement sensor and the image sensor are respectively and electrically connected with the control system. The testing hand fork comprises a sheet-like wrist part, a plurality of through arc-shaped holes are arranged in the rear portion of the wrist part, and a plurality of long and round holes connected with a palm part are arranged in the wrist part in front of the arc-shaped holes. A locating plate with a locating mark and a calibrating mark is arranged on the bottom surface in the front of the palm part, and a round concave table is arranged on the top surface of the palm part. An acceleration sensor is integrated in the center of the similar wafer shock sensor, and a calibrating object is arranged in the center of the top surface of the similar wafer shock sensor. The wafer conveying mechanical arm testing device can be widely applied in testing processes of various conveying mechanical arm location and repeated positioning accuracy.
Description
technical field [0001] The invention relates to a manipulator detection device, in particular to a wafer transmission manipulator test device suitable for testing the operation accuracy and stability of semiconductor transmission equipment. Background technique [0002] With the development of the domestic semiconductor industry and the long-term operation of integrated circuit foundries, the demand for localization of wafer transfer manipulators and the maintenance of existing imported equipment is increasing, and how to perform performance tests on manipulators after R&D and maintenance is the most urgent need One of the key problems to be solved. When testing the positioning, repeat positioning accuracy and operation stability of wafer transfer manipulators, displacement sensors or image recognition are generally used to directly measure the geometric features of the surface of the mechanical fingers at the end of the equipment. Obviously, when the geometric characterist...
Claims
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IPC IPC(8): G01M99/00
Inventor 马丽梅赵力行李浩林姚广军蒋俊海
Owner 北京京仪仪器仪表研究总院有限公司