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Multi-modal combined type energy collector based on flexible polymer piezoelectric materials

An energy harvester, piezoelectric material technology, applied in piezoelectric effect/electrostrictive or magnetostrictive motors, electromechanical devices, electrical components, etc., can solve the problem of high resonant frequency

Inactive Publication Date: 2015-04-29
PEKING UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] H. Liu et al. in "Piezoelectric MEMS Energy Harvester for Low-Frequency Vibrations With Wideband Operation Range and Steadily Increased OutputPower" (IEEE Journal of Microelectromechanical System 2011,20:1131-1142) (Chinese title: "Suitable for low-frequency vibration wideband stable high output Type Piezoelectric MEMS Energy Harvester", International Journal: IEEE Micro Electro Mechanical Systems) article reported a d 31 The modal piezoelectric energy harvester has a resonant frequency of 36Hz, which is suitable for collecting low-frequency vibrations in the environment, but the output voltage is relatively low, 124mV
Y.B.Jeon et al. in "MEMS power generator with transverse mode thin film PZT" (Sensors and Actuators A,2005,122:16-22) (Chinese title: "Based on transverse mode lead zirconate titanate thin film MEMS energy harvester ", International Journal: Sensors and Actuators A) article reported a d 33 Modal piezoelectric energy harvester, the output voltage is up to 3V, but the resonant frequency is too high, 13.9kHz

Method used

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  • Multi-modal combined type energy collector based on flexible polymer piezoelectric materials
  • Multi-modal combined type energy collector based on flexible polymer piezoelectric materials
  • Multi-modal combined type energy collector based on flexible polymer piezoelectric materials

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] Example 1 is d 31 with d 33 Modal composite piezoelectric energy harvester, the structure of the device mainly includes: PVDF film, PVDF cantilever beam, quality block, copper support column. The vibration in the external environment will cause the PVDF cantilever beam to vibrate, resulting in d 31 modal output; at the same time, the end mass vibrates with the PVDF cantilever beam and knocks the PVDF film on the lower substrate to generate d 33 Modal output. Since the device does not contain an electromagnetic module, the preparation steps of the inductance coil can be omitted, and the quality block at the end of the PVDF cantilever beam can also be replaced by other materials. The specific preparation steps are as follows:

[0047] (1) Prepare a PVDF film and PVDF cantilever beam with a thickness of 100 μm and metal aluminum electrodes;

[0048] (2) Place the PVDF film on the lower substrate;

[0049] (3) Build copper pillars to support the PVDF cantilever beam an...

Embodiment 2

[0055] Example 2 in d 31 with d 33 On the basis of the modal compound piezoelectric energy harvester, an electromagnetic module is added. The structure of the device mainly includes: PVDF film, PVDF cantilever beam, mass block, copper support column and MEMS planar inductance coil. When the external vibration makes the PVDF cantilever beam vibrate, in addition to generating piezoelectric output, the magnetic flux in the inductor coil will change to generate electromagnetic output. The specific preparation steps are as follows:

[0056] (1) Preparation and wafer cleaning;

[0057] (2) Oxidation and growth of 300nm SiO on both sides of the silicon wafer 2 Insulation;

[0058] (3) Sputtering 30nm Ti seed layer and 300nm Cu seed layer;

[0059] (4) Spin-coat positive resist with a thickness of 10 μm, and photolithography;

[0060] (5) Electroplated planar spiral Cu coil with a height of 10 μm;

[0061] (6) Remove photoresist;

[0062] (7) Remove the Ti / Cu seed layer;

[00...

Embodiment 3

[0072] Example 3 is in d 31 with d 33 On the basis of the modal composite piezoelectric energy harvester, a PVDF film is also added to the upper substrate, that is, the MEMS planar inductance coil in Example 2 is replaced by a PVDF film. The structure of the device mainly includes: PVDF film, PVDF cantilever beam, quality block, copper support column. The external vibration causes the PVDF cantilever beam to vibrate, resulting in d 31 modal output; at the same time, the terminal mass knocks the PVDF film on the upper and lower substrates, resulting in d 33 Modal output. Its concrete preparation steps are as follows:

[0073] (1) Prepare a PVDF film with a thickness of 100 μm and a metal aluminum electrode and a PVDF cantilever

[0074] beam;

[0075] (2) Place the PVDF film on the upper and lower substrates;

[0076] (3) Build copper pillars to support the PVDF cantilever beam and the upper substrate;

[0077] (4) Place the PVDF cantilever beam on the copper support, a...

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Abstract

The invention relates to a multi-modal combined type energy collector based on flexible polymer piezoelectric materials. Through assembly of the flexible polymer piezoelectric materials (like polyvinylidene fluoride (PVDF)), a permanent magnet (like neodymium iron boron (NdFeB)) and an inductance coil of a micro electro mechanical system (MEMS), multi-modal combined type energy collection is achieved, and low frequent vibration in environment can be effectively collected, and energy is supplied for low power consumption microelectronic devices.

Description

technical field [0001] The invention relates to a multi-mode composite energy harvester based on flexible polymer piezoelectric materials. , Micro-electromechanical system (MEMS) inductance coils are assembled to realize multi-mode and composite energy harvesting, which can effectively collect low-frequency vibrations in the environment and provide energy for low-power microelectronic devices. Background technique [0002] With the continuous development of science and technology, the Internet of Things technology has become a research hotspot of current information technology and has great development prospects. Wireless micro sensors are indispensable devices in the Internet of Things. Due to the limitation of the working environment, traditional functional methods Such as batteries, transmission lines, etc. cannot meet the needs of wireless micro-sensors, so new energy supply methods are required. Therefore, energy harvesting technology came into being. Energy harvestin...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/18H02K35/02
Inventor 张海霞韩梦迪张守鹤
Owner PEKING UNIV