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Bionic hair-type silicon micro-gyroscope for angular velocity sensing

A bionic hair, silicon micro-gyroscope technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, speed/acceleration/shock measurement, etc., can solve problems such as poor practicability, single function, complex structure, etc. High quality, improved sex-to-noise ratio, and high structural sensitivity

Active Publication Date: 2017-01-04
SOUTHEAST UNIV
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  • Abstract
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  • Application Information

AI Technical Summary

Problems solved by technology

However, the hair-type gyroscopes currently developed by most institutions have single functions, relatively complex structures, and poor practicability.

Method used

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  • Bionic hair-type silicon micro-gyroscope for angular velocity sensing
  • Bionic hair-type silicon micro-gyroscope for angular velocity sensing
  • Bionic hair-type silicon micro-gyroscope for angular velocity sensing

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Embodiment Construction

[0022] The present invention will be further described below in conjunction with the accompanying drawings.

[0023] Such as figure 1 , figure 2 with image 3 As shown, the present invention provides a bionic hair-type silicon micro-gyroscope for angular velocity sensitivity, which is used to measure the angular velocity input in the X-axis direction. The present invention includes an upper polymer hair 1, a middle silicon microsensor and a bottom layer with a circuit Glass substrate, the upper polymer hair 1 is obtained by stretching the polymer SU-8, and the middle silicon microsensor includes a circular mass 2 and an annular mass 3 concentric with the circular mass 2, so A first torsion beam 4-1 and a second torsion beam 4-2 are arranged between the circular mass 2 and the annular mass 3, the upper polymer hair 1 is bonded to the center of the circular mass 2, and the The circumferential side of the annular mass 3 is provided with four comb tooth groups 5 and square wav...

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Abstract

The invention discloses a bionic hair-type silicon micro-gyroscope for angular velocity sensing. The bionic hair-type silicon micro-gyroscope is composed of upper polymer hair, a middle silicon micro-sensor and a bottom glass substrate equipped with a circuit, wherein the middle silicon micro-sensor comprises a circular mass block and an annular mass block with a same circle center as the circular mass block; two torsion beams are arranged between the circular mass block and the annular mass block; the upper polymer hair is adhered onto the center of the circular mass block; and the circumferential lateral part of the annular mass block are uniformly provided with a plurality of comb groups and square wave supporting beams which are arranged in a staggered way. The bionic hair-type silicon micro-gyroscope is novel in structure, has high sensitivity and is compatible with conventional planar process; and compared with a simple conventional planar structure, the arrangement of the upper polymer hair is favorable for enlarging the Coriolis effect and improving structure sensitivity.

Description

technical field [0001] The invention belongs to the technical fields of micro-electromechanical systems and micro-inertial measurement, and in particular relates to a bionic hair-type silicon micro-gyroscope used for angular velocity sensitivity. Background technique [0002] MEMS sensor is a new type of sensor manufactured by micromachining technology, and it is an important branch of MEMS devices. With the development of microelectronics technology, integrated circuit technology and processing technology, MEMS sensors have greatly promoted the development of sensors by virtue of their advantages such as small size, light weight, low power consumption, high reliability, high sensitivity, easy integration and resistance to harsh working environments. Miniaturization, intelligence, multi-function and network development. MEMS sensors are gradually occupying the sensor market and gradually replacing the dominant position of traditional mechanical sensors. They have been favor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5656
CPCG01C19/5656
Inventor 杨波胡迪戴波王行军
Owner SOUTHEAST UNIV
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