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Multi-parameter batch test equipment of micro-electromechanical systems (MEMS) acceleration sensor

An acceleration sensor and batch testing technology, which is applied in the testing/calibration of speed/acceleration/shock measurement equipment, speed/acceleration/shock measurement, instruments, etc., can solve the problem of low calibration calibration efficiency, limited calibration calibration capability, and inability to achieve batch issues such as automatic calibration and calibration

Inactive Publication Date: 2013-04-24
苏州中盛纳米科技有限公司
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AI Technical Summary

Problems solved by technology

[0003] In order to solve the problems of long calibration and calibration time, low calibration and calibration efficiency, limited calibration and calibration capability, and inability to realize batch automatic calibration and calibration in existing calibration and calibration equipment, the present invention provides a multi-parameter batch testing equipment for MEMS acceleration sensors

Method used

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  • Multi-parameter batch test equipment of micro-electromechanical systems (MEMS) acceleration sensor
  • Multi-parameter batch test equipment of micro-electromechanical systems (MEMS) acceleration sensor
  • Multi-parameter batch test equipment of micro-electromechanical systems (MEMS) acceleration sensor

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Embodiment Construction

[0012] Multi-parameter batch test equipment for MEMS acceleration sensors, including variable environment device, batch calibration test platform, automatic card loading platform, multi-channel data acquisition system, variable environment control system, card loading control system, and main control system; batch The chemical calibration test platform, automatic card loading platform, and variable environment control system are all installed in the variable environment device; the signal output end of the multi-channel data acquisition system is connected to the signal input end of the main control system; the signal transmission of the variable environment device The terminal is connected to the signal transmission end of the main control system through the variable environment control system; the signal transmission end of the automatic loading platform is connected to the signal transmission end of the main control system through the loading control system; the automatic loa...

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Abstract

The invention relates to standardization correction technology of a micro-electromechanical systems (MEMS) acceleration sensor, in particular to multi-parameter batch test equipment of the MEMS acceleration sensor. The multi-parameter batch test equipment of the MEMS acceleration sensor solves the problems that existing standardization correction technology is long in standardization correction time consumption, low in standardization correction efficiency, and limited in standardization correction ability, and can not achieve batch automatic standardization correction. The multi-parameter batch test equipment of the MEMS acceleration sensor comprises a changeable environment device, a batch standardization test platform, an automatic clamping and mounting platform, a multi-channel data collection system, a changeable environment control system, a clamping and mounting control system and a main control system. The batch standardization test platform, the automatic clamping and mounting platform and the changeable environment control system are arranged in a changeable environment device. A signal output end of the multi-channel data collection system is connected with a signal input end of the main control system. The invention is applied to standardization correction of the MEMS acceleration sensor.

Description

technical field [0001] The invention relates to a calibration and calibration technology for MEMS acceleration sensors, in particular to a multi-parameter batch testing device for MEMS acceleration sensors. Background technique [0002] MEMS acceleration sensors are widely used in the automotive industry, industrial process control, medical care, consumer electronics, environmental protection and other fields. MEMS acceleration sensors need to be calibrated and calibrated through various tests for performance parameters after development and before use. According to different calibration requirements, MEMS acceleration sensors need to undergo mechanical tests, environmental tests, long-term stability and repeatability tests, etc. Among them, the mechanical test is divided into static test and dynamic test. Static tests include gravity field flip test, centrifugal test, etc. Dynamic tests include dynamic tests, vibration tests, etc. Environmental tests include temperature...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P21/00
Inventor 刘俊石云波丑修建郭涛薛彦辉
Owner 苏州中盛纳米科技有限公司
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