Heterojunction solar battery with electroplate electrodes and preparation method

A solar cell and heterojunction technology, applied in circuits, photovoltaic power generation, electrical components, etc., can solve the problems of metal electrode offset, high wire resistance, expensive metal silver, etc., to improve the conductivity of grid lines, improve battery performance, the effect of reducing shading loss

Inactive Publication Date: 2013-05-15
SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, since the HIT battery deposits a transparent conductive film with excellent electrical properties as the anti-reflection layer and conductive layer, the selectivity is poor when directly electroplated, and metal is easily deposited on the non-grid area, which affects light shading and leads to poor battery performance. decline
[0020] To sum up, for the screen printing technology, the prepared electrode has a low

Method used

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  • Heterojunction solar battery with electroplate electrodes and preparation method
  • Heterojunction solar battery with electroplate electrodes and preparation method
  • Heterojunction solar battery with electroplate electrodes and preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0098] Example 1. Please see attached Figure 4

[0099] (a) Form a transparent conductive thin film layer on the base of the HIT battery, the base includes preparing a HIT battery on an n-type or p-type substrate, and depositing a transparent conductive thin film transparent to point thin film includes one or more The combination can be deposited by PECVD, PVD, RPD, etc., with a thickness between 1nm and 1um.

[0100] The process steps of the transparent conductive thin film layer are:

[0101] a) Removal of damage and surface texturing of the crystalline silicon substrate;

[0102] b) Depositing an intrinsic amorphous silicon layer (i-type a-Si), about 0-50nm;

[0103] c) Depositing an n-type amorphous silicon layer (n-type a-Si), about 1-50nm;

[0104] d) Depositing an intrinsic amorphous silicon layer (i-type a-Si), about 0-50nm;

[0105] e) Depositing a p-type amorphous silicon layer (p-type a-Si), about 1-50nm;

[0106] f) Depositing a transparent conductive film o...

Embodiment 2

[0114] Example 2 (see Figure 5 )

[0115] Similar to technical route 1, this method can also be used for double-sided electroplating of heterojunction solar cells. The specific process is as follows Figure 5 As shown, it is a derivative of technical route 1, which is also the technical protection category of the present invention.

[0116] Steps (a)-(c) and steps (e) and (g) are similar to embodiment 1 and step (d) is:

[0117] (d) Double-sided electroplating to form electrodes. One of Ni, Cu, Ag, Sn, Al, Cr, Au, etc., or a combined stacking form of several types is electroplated on the opening of the mask and on the metal seed layer by electroplating. The electroplating technology includes electrodeposition, light-induced deposition or chemical deposition, etc. Since the mask is insulating, the electroplated metal is deposited on both sides only at the opening of the mask and on the metal seed layer, thereby forming a double-sided metal gate line pattern. Figure 5 A s...

Embodiment 3

[0118] Example 3. See Image 6

[0119] (a) Forming a transparent conductive thin film layer on the HIT battery substrate, the substrate includes preparing a HIT battery on an n-type or p-type substrate, and depositing a transparent conductive thin film on it, the transparent conductive thin film includes those mentioned in the rights One or a combination of materials (but not limited to) can be deposited by PECVD, PVD, RPD, etc., with a thickness between 1nm and 1um.

[0120] The formation process of the transparent conductive thin film layer is the same as that of Embodiment 1.

[0121] (b) A mask is patterned. The mask can cover the resist on the seed layer by printing, spin coating, spraying, roller hot pressing, pulling, dipping, PECVD, etc. The mask materials include ink, polymer, dry film, photoresist, SiO 2 、SiN x One or a combination of several of them, using selective chemical etching, photolithography, plasma etching, laser etching, etc. to form the mask pattern...

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Abstract

The invention relates to a heterojunction solar battery with an electroplate electrodes and a preparation method. The heterojunction solar battery with the electroplate electrodes and the preparation method are characterized in that a metal gate wire is arranged on a transparent single surface conducting layer or a transparent dual-surface conducting layer, and at least comprises a metal seed layer arranged on a transparent conducting layer, and metal electrodes sequentially arranged on the metal seed layer, wherein the metal electrodes at least sequentially comprise the combination of one layer, two layers or three layers among the metal layers mentioned as follows: a metal adhesion layer, a metal conducting layer and a metal welding layer, and the metal conducting layer is essentially included in the combination. The heterojunction solar battery with the electroplate electrodes and the preparation method provide the method for the heterojunction solar battery metal electrodes, have the advantages of being low in cost, and match with a prior preparation technology of a heterojunction with intrinsic thin film (HIT) solar battery.

Description

technical field [0001] The invention relates to a heterogeneous solar cell with electroplating electrodes and a preparation method, belonging to the field of heterogeneous solar cells. Background technique [0002] With the development of society and economy, the demand for energy continues to increase, and the limited traditional fuel energy is decreasing day by day, and the combustion process has a significant impact on the global climate and environment. The dual crises of energy and ecological environment force countries to vigorously promote the development of new energy and renewable energy, hoping that it can change human energy structure and maintain long-term sustainable development. As the most important energy in the 21st century, the total amount of solar energy resources is equivalent to more than 10,000 times that of energy used by human beings, and it has the characteristics of safety, pollution-free, and inexhaustible resources. More and more countries have b...

Claims

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Application Information

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IPC IPC(8): H01L31/0224H01L31/072H01L31/0747H01L31/18
CPCY02E10/50Y02P70/50
Inventor 邱羽俞健孟凡英刘正新
Owner SHANGHAI INST OF MICROSYSTEM & INFORMATION TECH CHINESE ACAD OF SCI
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