Power distribution cabinet for semiconductor equipment

Abstract

The invention discloses a power distribution cabinet special for a semiconductor device. The power distribution cabinet special for the semiconductor device comprises an on-off control device for controlling the on-off of the power distribution output of the power distribution cabinet, a parameter monitoring module for monitoring the running status of the power distribution cabinet, a field bus communication module for implementing the communication between an electrical device and a control module, and the control module which is respectively connected with the field bus communication module, the on-off control device and the parameter monitoring device and used for sending a control instruction to the corresponding on-off control device according to the control instruction received by the field bus communication module, receiving operating status information of the power distribution cabinet and sending a control signal to the electric device through the field bus communication module, wherein the operating status information of the power distribution cabinet is obtained by the parameter monitoring module. According to the power distribution cabinet special for the semiconductor device, the operating status of the main devices in the power distribution cabinet can be obtained in real time, and the control to the power distribution cabinet and the electric device can be achieved simultaneously.

Description

technical field [0001] The invention relates to the technical field of electronic equipment, in particular to a special power distribution cabinet for semiconductor equipment. Background technique [0002] In the prior art, some power distribution cabinets have data display and man-machine interface, which can display the electrical parameters of each distribution line; Single-phase current or three-phase current of three circuits can be measured; at the same time, it can monitor the switch status of each circuit. The above methods can simply monitor the working status of the power distribution cabinet, but none of them can realize the remote monitoring and control of the power distribution cabinet, and cannot meet the needs of electrical equipment with high power quality requirements. Contents of the invention [0003] (1) Technical problems to be solved [0004] The technical problem to be solved by the present invention is to provide a special power distribution cabin...

AI Technical Summary

Problems solved by technology

The above methods can simply monitor the working status of the power distribution cabinet, but none of them can realize the long-distance monitoring and control of the power distribution cabinet, and cannot meet the needs of electrical equipment with high power quality requirements.

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