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An energy detection device

An energy detection and lead-out technology, applied in discharge tubes, electrical components, circuits, etc., can solve problems such as insufficient safety and inconvenience, and achieve the effects of good performance, reliable stability, and convenient structural connection and operation.

Active Publication Date: 2016-02-10
BEIJING SHUOKE ZHONGKEXIN ELECTRONICS EQUIP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

High voltages can be measured directly with an electrostatic high voltage meter, but this is inconvenient and not safe enough

Method used

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Embodiment Construction

[0014] The present invention will be further introduced below with reference to the specific embodiments of the accompanying drawings. It should be understood that these descriptions are illustrative and the present invention is not limited thereto. The scope of the present invention is limited only by the scope of the appended claims.

[0015] figure 1 A 100KVR energy detection device is shown in , which includes: an insulating cover 1, an insulating cylinder 2, a PCB board 3, a fastening screw 4, a base plate 5, a cross countersunk screw 6, a countersunk head 7 and a printed board Fastener 8.

[0016] The insulating cover 1 and the base plate 5 are connected to the insulating cylinder 2 through the cross countersunk head screw 6, the printed board fixing part 8 and the fastening screw 4 fix the PCB board 3 in the insulating cylinder 2, and the countersunk head leads out The head 7 is fixed on the PCB board 3 .

[0017] The PCB board 3 adopts a 3mm thick epoxy copper clad ...

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Abstract

The invention discloses a 100 KVR energy detection device. The 100 KVR energy detection device comprises an insulating cover (1), an insulating cylinder (2), a printed circuit board (PCB) (3), a fastening screw (4), a base plate (5), a countersunk head cross screw (6), a countersunk extraction head (7), and a printed board fixed piece (8). The 100 KVR energy detection device is characterized in that the insulating cover (1) and the base plate (5) are connected with the insulating cylinder (2) through the countersunk head cross screw (6), the PCB (3) is fixed in the insulating cylinder (2) through the printed board fixed piece (8) and the fastening screw (4), and the countersunk extraction head (8) is fixed on the PCB (3). A specification specifically demonstrates a working principle of the device and gives a specific implementing scheme.

Description

technical field [0001] The invention relates to an energy detection device, in particular to an energy detection device for an ion implanter. Background technique [0002] With the increasing integration of semiconductor devices and semiconductor process equipment becoming more and more complex, the beam current requirements for ion sources are also getting higher and higher. In the ion implanter of semiconductor manufacturing process equipment, the energy of implanted ions is a key parameter that needs to be accurately controlled during ion implantation. High voltages can be measured directly with an electrostatic high voltage meter, but this is inconvenient and not safe enough. The conventional measurement applied to the ion implanter is generally achieved by using a set of high-value resistors and measuring the current through the high-value resistors at high voltage. The measuring ammeter in this method is at ground potential and can be directly connected to the console...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01J37/244
Inventor 彭彬
Owner BEIJING SHUOKE ZHONGKEXIN ELECTRONICS EQUIP CO LTD
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