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Method for assessing random error of ellipsometer measurement system

A measurement system, random error technology, applied in the direction of polarization influence characteristics, etc., can solve the problem that the measurement result deviates from the true value

Active Publication Date: 2015-02-18
HUAZHONG UNIV OF SCI & TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] When using a measuring instrument to measure the sample to be tested, the measurement result often deviates from its true value to a certain extent

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  • Method for assessing random error of ellipsometer measurement system
  • Method for assessing random error of ellipsometer measurement system
  • Method for assessing random error of ellipsometer measurement system

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Embodiment Construction

[0023] A method for evaluating the random error of the ellipsometer measurement system provided by the invention comprises the following steps:

[0024] Step 1 establishes the system model and system transfer function of the ellipsometer measurement system to be evaluated.

[0025] The ellipsometer measuring system applicable to the method of the present invention may be a rotating polarizer type, a rotating analyzer type, a single rotating compensator type, a double rotating compensator type and the like. The ellipsometer measurement system includes a light source, a polarizer arm, an analyzer arm and a detector.

[0026] The light beam emitted by the light source is unpolarized light, which becomes polarized light (usually elliptically polarized light) after being modulated by the polarizing arm. The polarized light interacts with the sample, and the polarization state changes, so that the sample information is coupled to the polarization of the polarized light. In the stat...

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Abstract

The present invention discloses a method for assessing random error of an ellipsometer measurement system. In the method, a system model and a system transfer function of the ellipsometer measurement system are established firstly, a random noise model applied for the specific configuration ellipsometer measurement system is established by analyzing the source and characteristics of the random noise of the ellipsometry measurement system, and finally a random noise transfer model is derived according to the transfer function and the random noise model, thereby calculating random errors of an evaluation system. A normal method for assessing instrument random error is to perform multiple measurements, and then assess random error of the measurement system according to the distribution of multiple measurements. By establishing the random noise model and calculating random noise transfer characteristics, the method can access random error of the ellipsometer measurement system in one measurement. The method is applicable for ellipsometer measurement systems of multiple configurations.

Description

technical field [0001] The invention belongs to the technical field of instrument measurement, and in particular relates to a new method for evaluating random errors of an ellipsometer measurement system. This method can evaluate the random error of the ellipsometer measurement system only by one measurement, and it is suitable for evaluating the random error of the ellipsometer measurement system with various configuration types. Background technique [0002] Ellipsometry is an optical measurement method to study the properties of the sample to be measured by detecting the change of the polarization state of polarized light before and after reflection (or transmission) of the sample. This measurement method is a high-precision, non-contact measurement method, which is widely used in process diagnostics such as thin film growth and real-time measurement of surface structure, measurement of optical properties of metals, physical adsorption and chemical adsorption and other fi...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01N21/21
Inventor 刘世元谷洪刚陈修国张传维李伟奇杜卫超
Owner HUAZHONG UNIV OF SCI & TECH