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mems valve operating profile

A convex surface, fluid control device technology for valve contouring

Inactive Publication Date: 2016-01-20
GM GLOBAL TECH OPERATIONS LLC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The first board includes a pair of electrical contact cavities

Method used

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  • mems valve operating profile
  • mems valve operating profile
  • mems valve operating profile

Examples

Experimental program
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Embodiment Construction

[0060] The following description is merely exemplary in nature and is not intended to limit the disclosure, application, or uses.

[0061] Referring to the drawings, wherein like reference numerals indicate like parts, in figure 1 A perspective view of a microelectromechanical device (MEMS) 8 in the form of a microvalve 10 is illustrated in and will now be described. Various examples of MEMS microvalves can be found in US Patent No. 8,011,388, the disclosure of which is hereby incorporated by reference. Microvalve 10 is typically mounted to a manifold (not shown), which facilitates fluid communication between the ports of the microvalve. Microvalve 10 includes a first plate 12 and a second plate 14 with an intermediate plate 16 sandwiched therebetween. The first plate 12 of the microvalve includes a pair of electrical contacts 18 suitable for connection to a power source or controller (not shown) to selectively provide electrical current to the microvalve 10 .

[0062] The ...

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PUM

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Abstract

The present invention relates to MEMS valve operating profiles. A MEMS fluid control system with a microelectromechanical system is provided. The system includes a plurality of ports, chambers, valves, actuators and a pair of electrical contacts. A plurality of ports communicate with the cavity, a valve is disposed within the cavity, and the valve is connected to the actuator. The system further includes a hydraulic circuit having a pressure supply line in communication with the first plurality of ports, a control line in communication with the second plurality of ports, and a discharge line in communication with the third plurality of ports. The valve includes an elongated portion and a blocking portion including first, second and third portions.

Description

technical field [0001] The present disclosure relates generally to microelectromechanical systems (MEMS), and more particularly to valve profiles for achieving modified output responses from MEMS valves. Background technique [0002] The statements in this section merely provide background information related to the present disclosure and may or may not constitute prior art. [0003] A typical microelectromechanical system (MEMS) control valve is a microvalve incorporated on a silicon substrate using microfabrication techniques. These systems have mechanical and electrical components with features measured in the micrometer range. A variety of microvalve devices have been used to control fluid flow within fluid circuits. A typical microvalve device includes a movable valve supported by a fixed body portion of the device and operatively coupled to an actuator. The movable valve is capable of alternately blocking the ports in response to an electrical signal provided to the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16K11/065F16K31/02
CPCF16K99/0011F16K99/0028F16K99/0044F16K2099/008Y10T137/86493Y10T137/8667Y10T137/86879
Inventor Z.谢
Owner GM GLOBAL TECH OPERATIONS LLC