mems valve operating profile
A convex surface, fluid control device technology for valve contouring
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[0060] The following description is merely exemplary in nature and is not intended to limit the disclosure, application, or uses.
[0061] Referring to the drawings, wherein like reference numerals indicate like parts, in figure 1 A perspective view of a microelectromechanical device (MEMS) 8 in the form of a microvalve 10 is illustrated in and will now be described. Various examples of MEMS microvalves can be found in US Patent No. 8,011,388, the disclosure of which is hereby incorporated by reference. Microvalve 10 is typically mounted to a manifold (not shown), which facilitates fluid communication between the ports of the microvalve. Microvalve 10 includes a first plate 12 and a second plate 14 with an intermediate plate 16 sandwiched therebetween. The first plate 12 of the microvalve includes a pair of electrical contacts 18 suitable for connection to a power source or controller (not shown) to selectively provide electrical current to the microvalve 10 .
[0062] The ...
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