Partition plate for coating cavity
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- NANCHANG O FILM TECH CO LTD
- Publication Date
- 2013-10-02
- Estimated Expiration
- Not applicable · inactive patent
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Abstract
Description
technical field
[0001] The invention relates to the field of coating technology, in particular to a partition for a coating chamber. Background technique
[0002] The roll-to-roll vacuum coating technology is widely used in the production of various flexible functional films, such as the production of ITO transparent conductive films, due to its advantages of high production efficiency.
[0003] Roll-to-roll vacuum coating equipment usually includes a coating roller and a number of coating chambers around the coating roller. There is a partition between the coating roller and the coating chamber. There is a window in the middle of the partition. There is a target. When the flexible substrate is used as the substrate for coating, one side of the flexible substrate is wound on the coating roller and slides over the coating roller under the action of external force, while the other side of the flexible substrate is close to or attached to the separator. During coating, a larg...