Air pressure floating anti-collision suspended base disc polishing device

Abstract

The invention discloses an air pressure floating anti-collision suspended base disc polishing device which comprises a base, a suspended base disc and a grinding disc. The suspended base disc is connected with a pressurized component and located on the grinding disc, the grinding disc rotates around a fixed central axis through a master drive, the opposite faces of the suspended base disc and the grinding disc are provided with wedge grooves and machining stations used for containing workpieces to be machined in the peripheral direction, the wedge grooves are filled with polishing solutions, the wedge grooves and the machining stations are arranged at intervals, the grinding disc is U-shaped, the suspended base disc is sleeved in the U-shaped grinding disc, and a gap is reserved between the suspended base disc and the inner wall of the U-shaped grinding disc. An air inlet cavity is formed in the center of the suspended base disc, radial orifices are evenly formed in the suspended base disc in the peripheral direction and are communicated with the air inlet cavity, orifice plugs are sleeved in the orifices, and an air supply pipeline is connected with the suspended base disc through an air storage cover and is communicated with the air inlet cavity. According to the air pressure floating anti-collision suspended base disc polishing device, friction and collision are eliminated through air flotation, grinding is stable, surface damage is little, and quality is high.

Description

technical field [0001] The invention relates to a polishing device, in particular to a suspension substrate polishing device. Background technique [0002] Fluid polishing has now become one of the important means to obtain ultra-smooth surfaces. Compared with rigid contact polishing, the contact state between abrasive grains and workpiece surface is soft contact, which can be obtained by improving the contour of abrasive grain processing. The ultra-smooth surface with roughness can also improve the contact state between the abrasive grains and the workpiece surface to obtain less damage-free processing effect. [0003] Suspension polishing has obvious advantages over current common fluid polishing. For example, the patent application number 201210140631.4 "Actively Driven Suspension Base Polishing Device" discloses an actively driven suspension base plate polishing device that can reduce the thickness of the processed metamorphic layer and obtain higher surface quality at ...

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the disadvantages of unstable grinding and low surface quality of existing suspension polishing devices, the present invention provides an air pressure

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