An improved three-point method calculation method for rotation error and roundness error
A technology of rotation error and three-point method, which is applied in the direction of measuring devices, instruments, and optical devices, can solve the problems of three-point method rotation error, etc., and achieve the effect of improving accuracy and separation accuracy
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[0022] The present invention will be further described below in conjunction with accompanying drawing:
[0023] Such as figure 1 As shown, the three displacement sensors are pressed by image 3 As shown in the position arrangement, the part rotates clockwise, and the rotation angle is represented by θ. The outputs of the three displacement sensors are S1(θ), S2(θ), and S3(θ), which include the shape error r(θ) of the cylindrical part, The relationship between x-direction component x(θ) and y-direction component y(θ) of rotation error is as follows:
[0024] S1(θ)=r(θ)+x(θ)(1)
[0025] S2(θ)=r(θ+α)+x(θ)*cos(α)+y(θ)*sin(α)(2)
[0026] S3(θ)=r(θ+β)+x(θ)*cos(β)+y(θ)*sin(β)(3)
[0027] Error separation is to separate the shape error r(θ), rotation error (x(θ), y(θ)) from the three measured outputs S1(θ), S2(θ), and S3(θ).
[0028] The specific algorithm is:
[0029] Construct a function S(θ) consisting of S1(θ), S2(θ), and S3(θ):
[0030] S(θ)=S1(θ)+a*S2(θ)+b*S3(θ)(4)
[00...
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