Acetone sensor device
A sensor device and sensor technology, applied in measurement devices, instruments, scientific instruments, etc., can solve the problems of inability to achieve high sensitivity and high linearity acetone detection, and achieve portable implementation, speed up the detection process, and easy implementation. Effect
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[0072] The present invention proposes an acetone sensor device, which has:
[0073] an air chamber for containing a breath sample from a subject;
[0074] an acetone sensor placed in the air chamber to generate an output current according to the acetone concentration of the breath sample;
[0075] a heating element for heating the acetone sensor; and
[0076] a measurement unit, coupled with the acetone sensor to provide a measurement signal corresponding to the output current;
[0077] Wherein the acetone sensor has:
[0078] a substrate;
[0079] a buffer layer deposited on the substrate;
[0080] an InN epitaxial layer deposited on the buffer layer to provide a current path for the output current;
[0081] a first conductive contact deposited on the InN epitaxial layer to provide a drain contact coupled to a first voltage;
[0082] a second conductive contact deposited on the InN epitaxial layer to provide a source contact coupled to a second voltage; and
[0083] A ...
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