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Stator elements and high vacuum pumps

A high vacuum pump and rotor element technology, applied in pump elements, pumps, axial flow pumps, etc., can solve problems such as flow reduction, improve flow, and promote pumping.

Active Publication Date: 2016-08-17
LEYBOLD HERAEUS GMBH & CO KG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the gas thus passes through the holes in the plates into the Holvik stage, flow losses occur which in turn cause a reduction in the flow

Method used

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  • Stator elements and high vacuum pumps
  • Stator elements and high vacuum pumps

Examples

Experimental program
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Embodiment Construction

[0020] In the illustrated exemplary embodiment, the high vacuum pump has a turbomolecular pump 10 . The turbomolecular pump 10 has a rotor 16 arranged on bearings 14 in a housing 12 . The rotor 16 has a plurality of rotor elements 18 each having a plurality of rotor blades. Arranged between the rotor elements 18 is a stator part 20 which is fastened in the housing 12 via a stator ring 22 . The gas is conveyed via the pump inlet 24 in the conveying direction 26 by means of the turbomolecular pump 10 .

[0021] A housing element 28 is connected to the housing 12 of the turbomolecular pump 10 . The housing element 28 has stator webs 32 on its inner side 30 . The stator web 32 is arranged directly adjacent to the last rotor element in the conveying direction 26 , so that no further intermediate elements, in particular no stator parts, are provided between the last rotor element 18 and the stator web 32 .

[0022] A cylindrical rotor hub 38 is fixedly connected to the last roto...

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Abstract

A stator element for a high vacuum pump is arranged downstream of the last rotor element in the conveying direction ( 26 ). The stator element has a housing element ( 28 ), which is connected to the housing ( 12 ) of the high-vacuum pump. On the inner side (30) of the housing element (28), a plurality of stator webs (32) arranged uniformly distributed in the circumferential direction are arranged.

Description

technical field [0001] The invention relates to a stator element for a high vacuum pump and a high vacuum pump. Background technique [0002] At present, a large number of high vacuum pumps are designed in two stages, the first stage being formed by a turbomolecular pump, to which a molecular pump or a gas friction pump is connected in the conveying direction. The turbomolecular pump has a plurality of rotor elements arranged in a housing, each rotor element having a plurality of rotor blades. A stator part, which is fixedly connected to the housing and has a plurality of stator blades, is arranged between the individual rotor elements. A Holweck stage is provided, for example, as a molecular pump or a gas friction pump connected to a turbomolecular pump. A Holvik stage has, for example, a cylinder connected to the last rotor element in the direction of flow. The cylinder is surrounded by one or more threaded circles. The delivery cross section of the molecular pump or g...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F04D19/04F04D29/44
CPCF04D19/044
Inventor 海因里希·恩伦德尔迈克尔·里希特
Owner LEYBOLD HERAEUS GMBH & CO KG