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Array substrate and display device

An array substrate and substrate technology, applied in the direction of electrical components, electric solid devices, circuits, etc., can solve the problems of poor thermal stability of low-resistance pure Al thin films, short circuit of gate scanning lines and data scanning lines, etc., so as to prevent thermal movement and reduce Cost, the effect of improving the yield

Inactive Publication Date: 2013-11-20
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the disadvantage of the low-resistance pure Al film is poor thermal stability. After heating to a certain extent, hillocks (hillocks) will appear, which will pierce the gate insulating layer, thereby causing gate scanning lines and source-drain electrodes or The data scan line is short-circuited

Method used

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Examples

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Effect test

Embodiment 1

[0029] The present invention provides an array substrate, including a substrate and a metal pattern on the substrate, the metal pattern is a double-layer structure, wherein the first layer structure is composed of the second metal and Al; the second layer structure is composed of Mo composition. In the present invention, other metal elements are added to Al to form alloys, such as Nd, Ti, Zr, Ta, Sc, Cu and other metals, and the added metals are formed at the grain boundaries to play the role of anchoring and prevent the formation of hillocks.

[0030] Wherein, the content ratio of the second metal to Al in the metal layer is lower than 1 / 99, preferably, the content ratio of the second metal to Al is between 1 / 999-1 / 199. While reducing the cost, it can solve the generation of a small amount of hillocks in the prior art, thereby increasing the yield rate of products by 1%-8%.

[0031] In this way, the Al / Mo double-layer structure is used to form a metal film with a high meltin...

Embodiment 2

[0035] The present invention provides an array substrate, including a substrate and a metal pattern deposited on the substrate, the metal material is a three-layer structure stacked in sequence, wherein the first layer structure is composed of Mo; the second layer structure is composed of the The second metal is composed of Al; the third layer structure is composed of Mo, Ti or Ta. The third layer structure is a barrier layer. In the present invention, other metal elements are added to Al to form alloys, such as Nd, Ti, Zr, Ta, Sc, Cu and other metals, and the added metals are formed at the grain boundaries to play the role of anchoring and prevent the formation of hillocks.

[0036] Wherein, the content ratio of the second metal to Al in the metal layer is lower than 1 / 99, preferably, the content ratio of the second metal to Al is between 1 / 999-1 / 199. While reducing the cost, it can solve the generation of a small amount of hillocks in the prior art, thereby increasing the y...

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PUM

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Abstract

The invention provides an array substrate and a display device. The array substrate comprises a substrate and metal patterns on the substrate, wherein the metal patterns comprise a metal layer made from a mixture of Al and a second metal, and the content ratio of the second metal to the Al in the metal layer is lower than 1 / 99. According to the array substrate disclosed by the invention, the content of the second metal in the metal layer is controlled to be lower than 1%, and the metal layer is applied to a grid scanning line and a data scanning line, so that the situation that small hills generate caused by the fact that the grid scanning line and the data scanning line are heated can be restrained.

Description

technical field [0001] The present invention relates to the field of display technology, in particular to an array substrate and a display device. Background technique [0002] Thin Film Transistor Liquid Crystal Display (TFT-LCD for short) has the characteristics of small size, low power consumption, and no radiation, and occupies a dominant position in the current flat panel display market. For TFT-LCD, the array substrate and manufacturing process determine its product performance, yield and price. [0003] Generally speaking, the array substrate mainly includes a substrate and a pixel unit on the substrate, and the pixel unit is mainly composed of a gate scanning line, a data scanning line, and a thin film transistor. Gate scan lines and data scan lines are used to transmit scan signals and data signals respectively. In order to prevent signal distortion during signal transmission, metals or metal alloys with good electrical conductivity are generally used as gate scan ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L23/532H01L23/525H01L27/02
CPCH01L23/53219H01L2924/0002H01L27/124H01L2924/00H01L23/528H01L23/53223H01L23/535
Inventor 刘翔
Owner BOE TECH GRP CO LTD