A nested rhombus enlarged two-dimensional precision positioning platform

Abstract

The invention discloses a nested rhombus-shaped amplification two-dimensional precise locating platform. By fixing a second shaft locating platform on a moving platform of a first shaft locating platform in the same plane, precise locating of the two-dimensional locating platform is achieved by adopting a nested structure, the moving directions form a 90-degree angle, moving coupling errors of two shafts during parallel connection are avoided, large space is obtained in the vertical direction, and the structure is compact. An amplifying mechanism is a rhombus-shaped mechanism. Amplifying amount can be 3-5 times as large as piezoelectric ceramic variation, amplification factor of a moving range is effectively increased, accumulative errors and angle errors of other amplifying mechanisms are avoided, and precise locating of the locating platform in a large range is achieved. In addition, a guiding and assisting effect on the moving platform is achieved by using a parallel-plate flexible hinge, the moving platform keeps consistency of the moving directions under the protection of the parallel-plate flexible hinge, and damage caused by any movement and external force perpendicular to the moving directions is avoided.

Description

technical field [0001] The invention belongs to the technical field of micro-drive applications, and in particular relates to a nested diamond-shaped enlarged two-dimensional precision positioning platform. Background technique [0002] At present, two-dimensional precise micro-positioning technology is indispensable in various fields of micro-drives, such as micro-electro-mechanical systems, optical adjustment, ultra-precision processing, biological cell manipulation, STM and AFM microscope scanning platforms, etc., and has broad application prospects , and can produce huge social and economic benefits, it has become one of the indispensable key technologies in the field of micro-drive precision positioning. [0003] The two-dimensional precision positioning platform, the main function is to realize the two-dimensional precise movement and positioning of the sample to be operated or observed, and the two-dimensional operation of the microprobe. The realization of its two-d...

AI Technical Summary

Problems solved by technology

[0010] In view of this, the present invention provides a nested diamond-shaped enlarged two-dimensional precision positioning platform to solve the cumulative error and angle error existing in the positioning platform in the prior art, improve the output performance and positioning accuracy of the positioning platform, and realize positioning Precise positioning on a wide range of platforms

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